On Performance of the Gradient Temperature Control Method for Uniform Heating

Nanno, Ikuo; Tanaka, Masahito; Matsunaga, Nobutomo; Kawaji, Shigeyasu

doi:10.1541/ieejeiss.124.1606

Cited by 8 publications

(3 citation statements)

References 1 publication

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“…Interference matrix operation is the widely used method in the field of electromechanical control. For example, the method has been applied to thermally treat equipment using multiple heaters and multiple temperature monitors to realize a uniform temperature distribution including a transient state, 13,14) where the method can determine outputs of each heater while eliminating interferences of the thermal flux from the other heaters, realizing a precise and high-speed control. Figures 10(a)-10(d) show schematic views of the pulse-controlled gas injection method using interference matrix operation.…”

Section: Pulse-controlled Gas Injection Using Interference Matrix Ope...mentioning

confidence: 99%

Gas Flow Characteristics in a Plasma Process Chamber and Proposal of New Pulse-Controlled Gas Injection Method Using Interference Matrix Operation for Rapid Stabilization of Gas Pressure

Morishita

Goto

Shirai

et al. 2011

Jpn. J. Appl. Phys.

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To realize precise and high-throughput multiprocesses in a single plasma process chamber with a rapid alternative of multiple gases, gas flow characteristics in a plasma process chamber are investigated and a pulse-controlled gas injection method is developed. It is found that gas replacement characteristics greatly depend on the gas supply method used. An upper shower plate has a great advantage in realizing a rapid gas replacement over the case without using the upper shower plate, resulting from the realization of the down flow pattern of feed gas in the chamber. The pulse-controlled gas injection method employs the intentional overshoot pulse at the beginning of gas supply to rapidly stabilize gas pressure. Interference matrix operation is newly introduced to determine the pulse size for the arbitrary gas flow pattern in the chamber. The optimum pulse size can be successfully obtained in the case of HBr addition to a pure Ar plasma.

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Section: Pulse-controlled Gas Injection Using Interference Matrix Ope...mentioning

confidence: 99%

Gas Flow Characteristics in a Plasma Process Chamber and Proposal of New Pulse-Controlled Gas Injection Method Using Interference Matrix Operation for Rapid Stabilization of Gas Pressure

Morishita

Goto

Shirai

et al. 2011

Jpn. J. Appl. Phys.

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“…These difficulties have a significant impact on the transient response and temperature difference. Thus, some advanced compensation methods have been proposed: feed forward compensation, data-driven tuning, and gradient temperature control [18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Slow Mode-Based Control Method for Multi-Point Temperature Control System

Hashimoto

Jiang

et al. 2019

Processes

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In recent years, thermal processing systems with integrated temperature control have been increasingly needed to achieve high quality and high performance. In this paper, responding to the growing demands for proper transient response and to provide more accurate temperature controls, a novel slow-mode-based control (SMBC) method is proposed for multi-point temperature control systems. In the proposed method, the temperature differences and the transient response of all points can be controlled and improved by making the output of the fast modes follow that of the slow mode. Both simulations and experiments were carried out, and the results were compared to conventional control methods in order to verify the effectiveness of the proposed method.

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“…These difficulties will have a great impact on the transient response and the steady-state stability of the controlled system. Thus more and more advanced compensation methods have been proposed to compensate the influence of each point and uniform the output of multi-point systems such as feedforward compensation, the data-driving method and the gradient control method [17][18][19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

Pole-Zero Cancellation Method for Multi Input Multi Output (MIMO) Temperature Control in Heating Process System

Hashimoto

Jiang

2019

Processes

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With the rapid development of industrial technology, the multi-point (multi-input multi-output) heating processing systems with integrated temperature control have been increasingly needed to achieve high-quality and high-performance processing. In this paper, in response to the demand for proper transient response and to provide more accurate temperature controls, a novel pole-zero cancelation method is proposed for multi-input multi-output (MIMO) temperature control in heating process systems. In the proposed method, the temperature differences and transient characteristics of all points can be improved by compensating dead time difference and coupling effect together by matrix compensation and pole-zero cancelation with the feedforward reference model. Both simulations and experiments were carried out. The results were compared to the well-tuned conventional PI control system and PI plus decoupling compensation system to evaluate the control efficiency of the proposed method.

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On Performance of the Gradient Temperature Control Method for Uniform Heating

Cited by 8 publications

References 1 publication

Gas Flow Characteristics in a Plasma Process Chamber and Proposal of New Pulse-Controlled Gas Injection Method Using Interference Matrix Operation for Rapid Stabilization of Gas Pressure

Gas Flow Characteristics in a Plasma Process Chamber and Proposal of New Pulse-Controlled Gas Injection Method Using Interference Matrix Operation for Rapid Stabilization of Gas Pressure

Slow Mode-Based Control Method for Multi-Point Temperature Control System

Pole-Zero Cancellation Method for Multi Input Multi Output (MIMO) Temperature Control in Heating Process System

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