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AFRL-SR-AR-TR-07_007
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ABSTRACTOscillations of clamped-clamped and free-free micro-electromechanical resonators and resonator arrays have been studied in this effort. Piezoelectric actuation is used to excite these resonator structures on the input side and piezoelectric sensing is carried out on the output side. Composite structural models have been developed for these filters, and analyses has been carried out to explain experimental observations of nonlinear phenomena as well as to guide the design of these filters are presented. Semi-analytical design tools for microelectromechanical resonators and micro-electromechanical resonator arrays have been developed. The phenomenon of intrinsic localized modes in resonator arrays has also been studied, and it is shown that these modes can be explained as forced nonlinear vibration modes. Oscillations of clamped-clamped and free-free micro-electromechanical resonators and resonator arrays have been studied in this effort. Piezoelectric actuation is used to excite these resonator structures on the input side and piezoelectric sensing is carried out on the output side. Composite structural models have been developed for these filters, and analyses has been carried out to explain experimental observations of nonlinear phenomena as well as to guide the design of these filters are presented. Semi-analytical design tools for micro-electromechanical resonators and micro-electromechanical resonator arrays have been developed. The phenomenon of intrinsic localized modes in resonator arrays has also been studied, and it is shown that these modes can be explained as forced nonlinear vibration modes. The research findings can open the doors to new resonator array designs.Keywords: microscale resonators, buckling, nonlinear phenomena, axial-load effects, piezoelectric actuation, Doiffing oscillator, resonator arrays, intrinsic localized modes.
IntroductionTwo types of piezoelectrically actuated micro-scale resonators, which are attractive for communication and signal-processing applications [1], are considered in this research effort. One type of resonators will be referred to as the AIGaAs resonator, and the other type of resonators will be referred to as the PZT resonator. Both types of resonators are composite structures, and the PZT resonators have asymmetric cross-sections, as shown in Figure 1. During the fabrication of the reson...