2014 27th International Conference on VLSI Design and 2014 13th International Conference on Embedded Systems 2014
DOI: 10.1109/vlsid.2014.72
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On Manufacturing Aware Physical Design to Improve the Uniqueness of Silicon-Based Physically Unclonable Functions

Abstract: Physically Unclonable Functions (PUFs) are hardware cryptographic primitives for generating unique signatures from complex and irreproducible manufacturing variations. The uniqueness of a PUF is a fundamental performance metric that defines the extent to which a response is tied to a single device. It is often compromised if the manufacturing variations are suppressed. Though attempts have been made to improve the quality of a PUF at system level, very little work has been done at enhancing the impact of manuf… Show more

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Cited by 13 publications
(9 citation statements)
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“…Using optical lithography, devices and interconnect layers are printed layer by layer in specified patterns on semiconductor wafers using a monochromatic light source focused through a lens and mask system. The entire IC fabrication process consists of hundreds of patterning, deposition, etching, doping, and polishing steps, all with inherent variabilities [14,16,23,24]. These include irregularities in etching, doping and polishing steps, light source intensity fluctuations, lens and mask defects and alignment, defocus, and interference problems [16].…”
Section: Lithography Based Pufsmentioning
confidence: 99%
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“…Using optical lithography, devices and interconnect layers are printed layer by layer in specified patterns on semiconductor wafers using a monochromatic light source focused through a lens and mask system. The entire IC fabrication process consists of hundreds of patterning, deposition, etching, doping, and polishing steps, all with inherent variabilities [14,16,23,24]. These include irregularities in etching, doping and polishing steps, light source intensity fluctuations, lens and mask defects and alignment, defocus, and interference problems [16].…”
Section: Lithography Based Pufsmentioning
confidence: 99%
“…The entire IC fabrication process consists of hundreds of patterning, deposition, etching, doping, and polishing steps, all with inherent variabilities [14,16,23,24]. These include irregularities in etching, doping and polishing steps, light source intensity fluctuations, lens and mask defects and alignment, defocus, and interference problems [16]. The variations in the final dimensions of a device are a combination of variations introduced by the lithographic exposure, photo-resist processing and etching steps.…”
Section: Lithography Based Pufsmentioning
confidence: 99%
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“…Since then, much effort has been spent on improving their statistical metrics, mainly by increasing the circuits overall delay and variance. Most prior work used additional circuitry [3], modified circuit components [4] or manipulation of the production process [5], [6]. To our best knowledge, no investigation on improving Arbiter PUFs by modifying the existing structures' sizes was done yet.…”
Section: Introductionmentioning
confidence: 99%