“…Using optical lithography, devices and interconnect layers are printed layer by layer in specified patterns on semiconductor wafers using a monochromatic light source focused through a lens and mask system. The entire IC fabrication process consists of hundreds of patterning, deposition, etching, doping, and polishing steps, all with inherent variabilities [14,16,23,24]. These include irregularities in etching, doping and polishing steps, light source intensity fluctuations, lens and mask defects and alignment, defocus, and interference problems [16].…”