On‐line computation of diffractograms for the analysis of SEM images

Erasmus, S.; Holburn, DM; Smith, K.C.

doi:10.1002/sca.4950030403

Cited by 31 publications

(14 citation statements)

References 6 publications

(6 reference statements)

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“…On the other hand, this measured value is closely related to the electron beam size when we utilize the ideal sample for highresolution observation. However, the electron beam size is not numerically in agreement with the present measured value, since they each have different definitions (Erasmus et al 1980). The minimum specimen periodicity Λ min may be of the order of twice the electron beam diameter or the conventional edge-to-edge resolution (Reimer 1985).…”

Section: A Highly Precise Resolution Measurement Of Sem Images Using mentioning

confidence: 83%

New generation scanning electron microscopy technology based on the concept of active image processing

1997

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Summary:A new generation of scanning electron microscopy (SEM) technology is proposed based on the concept of "active image processing." In order to collect sufficient data for a purpose which is defined in the utilization of active image processing, we may need more devices from among a variety of useful hardware, for example, a digital scan generator with meaningful parameters and an analog-to-digital converter for ultrahigh density recording. After the data acquisition, the application of some digital image processing techniques is certainly effective, because the method in question is specially designed so that the property of obtained data will be suitable for the application of these techniques. The present technology should produce a variety of attractive options in the field of SEM.

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Section: A Highly Precise Resolution Measurement Of Sem Images Using mentioning

confidence: 83%

New generation scanning electron microscopy technology based on the concept of active image processing

1997

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“…The FFT resolution method generates the power spectrum, that is, the two-dimensional Fourier transform, of the image (Dodson and Joy 1990, Erasmus et al 1980, Joy 2002 and determines from this the highest spatial frequency which it contains. This corresponds to the smallest detectable distance between fea- 178 Scanning Vol.…”

Section: Fourier Transform Methodsmentioning

confidence: 99%

“…As a result, the discrimination between signal and noise is necessarily imprecise, although in a recent implementation (Rosenberg et al 2002), the effects of operator choice were completely removed by introducing an automated procedure to infer the threshold between signal and noise in the Fourier space. The superposition diffractogram method (Erasmus et al 1980, Joy 2002, Oho and Toyomura 2001, also avoids the necessity for operator input, but it requires two sequentially recorded copies of the same image.…”

Section: Fourier Transform Methodsmentioning

confidence: 99%

Experimental resolution measurement in critical dimension scanning electron microscope metrology

Lorusso

Joy

2003

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Summary: By applying the basic principles of metrology we discuss how to define the standards that any experimental method to measure resolution has to obey. Our results clearly indicate the need to apply a calibration procedure when designing algorithms to estimate resolution to satisfy accuracy requirements. Similarly, the precision of an algorithm has to be clearly specified. We compare here the performances of a variety of commonly used implementations of published methods, with that of an algorithm based on an approach known to be reliable. Our results confirm that when an algorithm is designed with the clear intent of satisfying metrology requirements, it demonstrates excellent accuracy, precision, and lack of sensitivity to the noise level, as is desirable. As a consequence, the algorithm will have the ability to measure accurately the point spread function convoluted in the image, thus paving the way for quantitative deconvolution techniques.

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“…The basis of the method is to obtain a diffractogram in the form of a power spectrum i.e. the two-dimensional Fourier transform, of the image 10 . The intensity distribution of the different spatial frequencies in the image is displayed with the frequency increasing radially from the center of the transform.…”

Section: Using the Analysis Programmentioning

confidence: 99%

Tools to measure CD-SEM performance

et al. 2006

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It is important to be able to quantify the imaging performance of CD-SEMs for such purposes as verifying the specification, rechecking after a routine maintenance, or for tool matching. To perform tests such as these it is necessary to have both appropriate software for image analysis and suitable test samples. A package of 2-D Fourier transform and analysis software, designed as a plug-in for the shareware IMAGE-Java program, has been developed and is freely available on line. The requirement for a reproducible and well characterized sample has been met by using direct-write electron beam lithography to fabricate a suitable Fresnel zone plate structures.

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On‐line computation of diffractograms for the analysis of SEM images

Cited by 31 publications

References 6 publications

New generation scanning electron microscopy technology based on the concept of active image processing

New generation scanning electron microscopy technology based on the concept of active image processing

Experimental resolution measurement in critical dimension scanning electron microscope metrology

Tools to measure CD-SEM performance

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