On-Chip Thin Film Inductor for High Frequency DC-DC Power Conversion Applications

Selvaraj, S. Lawrence; Haug, Martin; Cheng, Chor Shu; Dinulovic, Dragan; Peng, Lulu; Shafey, Khaled El; Ali, Zishan; Shousha, Mahmoud; Ng, Yong Chau; Yosokumoro, Nur Aziz; Lehmann, Lothar; Wieland, Marcel

doi:10.1109/apec39645.2020.9124544

Cited by 18 publications

(6 citation statements)

References 8 publications

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“…For the direct comparison of structures, we introduced a new figure of merit defined by ( 1) and (3). Using this evaluation method, we consider works [21] and [29] as the best examples of integrated inductor design. Both integrated inductors were designed and fabricated for use in a fully integrated voltage regulator.…”

Section: Discussionmentioning

confidence: 99%

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An Overview of Fully On-Chip Inductors

Ondica¹,

Kovac²,

Hudec³

et al. 2023

RADIOENGINEERING

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This paper focuses on full integration of passive devices, especially inductors with emphasis on multi-layer stacked (MLS) structures of fully integrated inductors using patterned ground shield (PGS) and fully integrated capacitor. Comparison of different structures is focused on the main electrical parameters of integrated inductors (e.g. inductance 𝐿, inductance density 𝐿 𝐴 , quality factor 𝑄, frequency of maximum quality factor 𝐹 𝑄max , self-resonant frequency FSR, and series resistance 𝑅 DC ) and other non-electrical parameters (e.g. required area, manufacturing process, purpose, etc.) that are equally important during comparison of the structures. Categorization of inductor structures with most significant results that was reported in the last years is proposed according to manufacturing process. Final geometrical and electrical properties of the structure in great manner accounts to the fabrication process of integrated passive device. This work offers an overview and state-of-the-art of the integrated inductors as well as manufacturing processes used for their fabrication. Second purpose of this paper is insertion of the proposed structure from our previous work among the other results reported in the last 7 years. With the proposed solution, one can obtain the highest inductance density 𝐿 𝐴 = 23.59 nH/mm 2 and second highest quality factor 𝑄 = 10.09 amongst similar solutions reported in standard technologies that is also suitable competition for integrated inductors manufactured in advanced technology nodes.

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Section: Discussionmentioning

confidence: 99%

“…The highest FoM was achieved for the solenoid inductor from [29] with a magnetic iron core that was developed for a DC-DC integrated voltage regulator. This result was possible mainly because of extremely high inductance 𝐿 = 120 nH and relatively high maximum quality factor 𝑄 max = 14.5 at low frequency 𝐹 𝑄max = 10 MHz.…”

Section: Figure Of Meritmentioning

confidence: 99%

An Overview of Fully On-Chip Inductors

Ondica¹,

Kovac²,

Hudec³

et al. 2023

RADIOENGINEERING

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“…Its main purpose is protection and encapsulation of manufactured chips [44]. By deposition of conductive materials in combination with insulating and magnetic layers, fully-integrated inductor with magnetic cores can be formed on top of IC with decent inductance density L A = 133 nH/mm 2 , quality factor Q = 16 at frequency F = 3.2 MHz [5], [35].…”

Section: B Fbeolmentioning

confidence: 99%

Fully Integrated On-Chip Inductors: An Overview

Robert

Kovac

Richard

et al. 2022

2022 20th International Conference on Emerging eLearning Technologies and Applications (ICETA)

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This paper presents an overview and State-of-the-Art of fully integrated inductors with common fabrication processes used for implementation of these structures into a chip. The first step is an overview of fabrication technologies that starts with standard CMOS general purpose processes expanded by Far-BEOL and substrate alteration process (SOI, Silicon Embedded, TSV, TGV, PTH, Core Insertion); and continues to advanced process nodes like SMMT and Bond Wire utilization. Then, an overview of fully integrated inductor structures consists of selected topologies with notable parameters achieved in last few years. Critical parameters of integrated inductors include: inductance L DC , inductance density L A , quality factor Q, selfresonant frequency FSR and series resistance R DC . These parameters are as important as the purpose and fabrication process.

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“…Selvaraj, S.L. et al reported the design and fabrication of an on-chip solenoid inductor with a novel thin film magnetic core for highfrequency DC-DC power conversion applications [3]. All existing reports have underscored the substantial utility of micro-inductors in integrated devices, as well as the relatively advanced research on micro-inductors.…”

Section: Introductionmentioning

confidence: 99%

The simulation study of high-performance micro-inductors Based on MEMS 3D coils

Yi,

Pi,

Chen

et al. 2024

J. Phys.: Conf. Ser.

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With the development of flexible electronics and microsystems, the demand for the miniaturization of electronic components is becoming increasingly urgent. Due to the advantages of miniaturization, low power consumption, and easy integration, the micro-inductors fabricated by microfabrication technology get more and more attention. However, the traditional two-dimensional inductors are no longer able to meet the growing needs of today’s society in terms of occupied areas, inductance values, and packaging costs. So, this paper proposes a three-dimensional structure thin film solenoid micro-inductor based on MEMS and analyzes it by using finite element method (FEM). The simulation focuses on recording the inductance values and quality factors of the micro-inductors with varying parameters in the frequency range of 0-2, 000 MHz. Additionally, the maximum current values corresponding to the micro-inductors with different parameters are recorded at the operating temperature of polyimide, specifically addressing the current-carrying capacity. The simulation result has certain theoretical guidance for high-performance micro-inductors design.

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On-Chip Thin Film Inductor for High Frequency DC-DC Power Conversion Applications

Cited by 18 publications

References 8 publications

An Overview of Fully On-Chip Inductors

An Overview of Fully On-Chip Inductors

Fully Integrated On-Chip Inductors: An Overview

The simulation study of high-performance micro-inductors Based on MEMS 3D coils

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