On-chip nanohole array based sensing: a review

Abstract

The integration of nanohole array based plasmonic sensors into microfluidic systems has enabled the emergence of platforms with unique capabilities and a diversified palette of applications. Recent advances in fabrication techniques together with novel implementation schemes have influenced the progress of these optofluidic platforms. Here, we review the advances that nanohole array based sensors have experienced since they were first merged with microfluidics. We examine established and new fabrication methodologies that have enabled both the fabrication of nanohole arrays with improved optical attributes and a reduction in manufacturing costs. The achievements of several platforms developed to date and the significant benefits obtained from operating the nanoholes as nanochannels are also reviewed herein. Finally, we discuss future opportunities for on-chip nanohole array sensors by outlining potential applications and the use of the abilities of the nanostructures beyond the optical context.

Applications of nanoimprint lithography/hot embossing: a review

“…Nanoimprint in PMMA/SU-8 was also used to fabricate surface plasmonic biosensors with waveguide metal gratings for protein detection [164,165]. Details of the development in this area can be found in ref [32,166,167].…”

“…In the past two decades, a substantial amount of work have been conducted in solving these technical difficulties [2,14,[23][24][25][26][27][28]. Broad applications of NIL have been witnessed, particularly in the manufacture of nanostructures [29][30][31][32], nanodevices [33,34], optic components [35,36], highdensity quantized magnetic disks [37] and Si MOSFETs [38][39][40][41][42][43][44][45][46][47][48][49][50][51][52], etc. This paper will review some of the applications by NIL in these areas through several examples.…”

Robust Free‐Standing Nano‐Thin SiC Membranes Enable Direct Photolithography for MEMS Sensing Applications

“…The principle of the self-sensing SiC membrane is based on the piezoresistive effect of the SiC film, which utilizes the change of the SiC resistance under mechanical impacts (e.g., force, pressure, stress). [30] The piezoresistive effect in SiC has been widely utilized in SiC pressure sensors which were developed using a dry etching process. [32][33][34][35][36] A comprehensive review on the applications of the piezoresistance of SiC can be found in ref.…”

“…It should be pointed out that a similar technique has been reported in SiN membranes, with relatively small window sizes. [29,30] However, to the best of our knowledge, there has been no report on utilizing the direct lithography process into SiC nano membranes. In addition, application of lithography on large-scale suspended membranes with an aspect ratio of above 1:3000 is also unprecedented.…”

Desarrollo de superficies nanoestructuradas para biosensores ópticos y sensores biomiméticos

“…Tal es la variedad de técnicas que desde hace más de una década se han desarrollado multitud de dispositivos plasmónicos basados en redes de agujeros submicrométricos realizados en películas metálicas, principalmente de oro y plata. 51,[95][96][97][98][147][148][149][150][151][152][153] Cada uno de los métodos litográficos enumerados tiene sus ventajas e inconvenientes, y su elección está condicionada por factores tales como su empleo para investigación o prototipado -para lo cual EBL y FIB son adecuadas-o su potencial uso para producción en masa -para lo que las técnicas de nanoimpresión UV, 99 Otra aplicación de la técnica EBL con relación directa con esta Tesis es la capacidad para definir nanopilares mediante el empleo de resinas negativas. En los últimos años se han publicado numerosos trabajos basados en redes de nanopilares aplicados a la biodetección empleando diferentes técnicas y materiales, [154][155][156][157][158] y las técnicas litográficas mencionadas anteriormente ofrecen la posibilidad de nanoestructurar resinas poliméricas y crear, en un número reducido de etapas, nanocolumnas con alta resolución y relación de aspecto.…”