2016
DOI: 10.1021/acssensors.6b00428
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On-Chip Mid-Infrared Photothermal Spectroscopy Using Suspended Silicon-on-Insulator Microring Resonators

Abstract: Mid-infrared spectroscopic techniques rely on the specific ”fingerprint” absorption lines of molecules in the mid-infrared band to detect the presence and concentration of these molecules. Despite being very sensitive and selective, bulky and expensive equipment such as cooled mid-infrared detectors is required for conventional systems. In this paper, we demonstrate a miniature CMOS-compatible Silicon-on-Insulator (SOI) photothermal transducer for mid-infrared spectroscopy which can potentially be made in high… Show more

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Cited by 52 publications
(33 citation statements)
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“…The detection limits for H 2 O obtained by the QEPTAS sensor at distances of 1 m and 2 m were~12 ppm and~55 ppm, corresponding to a NNEA coefficients of 8.4 × 10 −7 W•cm −1 •Hz −1/2 and 3.7 × 10 −6 W•cm −1 •Hz −1/2 , respectively. Compared to other photothermal spectroscopy techniques based on a silicon resonator [36] or a fiber-coupled Fabry-Pérot interferometer [37], the NNEA of QEPTAS is competitive. Yufei Ma et al…”
Section: Experiments and Resultsmentioning
confidence: 99%
“…The detection limits for H 2 O obtained by the QEPTAS sensor at distances of 1 m and 2 m were~12 ppm and~55 ppm, corresponding to a NNEA coefficients of 8.4 × 10 −7 W•cm −1 •Hz −1/2 and 3.7 × 10 −6 W•cm −1 •Hz −1/2 , respectively. Compared to other photothermal spectroscopy techniques based on a silicon resonator [36] or a fiber-coupled Fabry-Pérot interferometer [37], the NNEA of QEPTAS is competitive. Yufei Ma et al…”
Section: Experiments and Resultsmentioning
confidence: 99%
“…With 10-s integration time, the sensor can detect hydrocarbons down to 3.2 ppmv. Further sensitivity boost into the ppbv regime mandates new detection schemes that can transcend the optical path length limit, for example, through cavity-enhanced photothermal spectroscopy [218][219][220].…”
Section: Performance Projectionmentioning
confidence: 99%
“…The spectrum could be observed by scanning the wavelength of Pu. The wavelength could be scanned by modulating the light source [11][12][13][14] or by filtering the white light with a monochromator or optical filters (OFs). [15][16][17] However, the rapid wavelength scanning of the light source, at a sufficient range, is difficult.…”
Section: Introductionmentioning
confidence: 99%