2012
DOI: 10.1021/ac302551s
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On-Chip Integrated Mid-Infrared GaAs/AlGaAs Mach–Zehnder Interferometer

Abstract: We report the design, fabrication, and first functional verification of mid-infrared (MIR; 3-12 μm) Mach-Zehnder interferometers (MZIs). The developed MIR-MZIs are entirely chip-integrated solid-state devices based on GaAs/AlGaAs technology waveguide fabricated via conventional optical lithography and reactive ion etching (RIE). Thus, fabricated MIR-MZIs were combined with a broadly tunable quantum cascade laser (tQCL) providing a wavelength coverage of 5.78-6.35 μm. MIR-MZIs have been designed with a waveguid… Show more

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Cited by 58 publications
(40 citation statements)
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References 10 publications
(23 reference statements)
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“…The coherent nature of QCL emission enables advanced measurement schemes beyond conventional direct absorption measurements such as optical heterodyne detection 38,[89][90][91] or Mach-Zehnder interferometry. [92][93][94] Further, an optical coherence tomography (OCT) system in the mid-IR region based on a QCL has been realized. 95,96 The improved characteristics of QCLs enabled the implementation of frequency combs 97 that provide an emission spectrum composed of a set of modes that are perfectly equally-spaced and have a well-defined phase relationship between each other.…”
Section: Specific Properties Of Qcls Relevant For Applied Spectroscopymentioning
confidence: 99%
“…The coherent nature of QCL emission enables advanced measurement schemes beyond conventional direct absorption measurements such as optical heterodyne detection 38,[89][90][91] or Mach-Zehnder interferometry. [92][93][94] Further, an optical coherence tomography (OCT) system in the mid-IR region based on a QCL has been realized. 95,96 The improved characteristics of QCLs enabled the implementation of frequency combs 97 that provide an emission spectrum composed of a set of modes that are perfectly equally-spaced and have a well-defined phase relationship between each other.…”
Section: Specific Properties Of Qcls Relevant For Applied Spectroscopymentioning
confidence: 99%
“…This is made possible by employing an interferometric principle of operation in a Mach-Zehnder type optical setup. Although single wavelength (integrated) Mach-Zehnder interferometers (MZI) are widely employed for (bio-)chemical sensing, especially in the visible spectral range [17,18], a report on directly recording a liquid sample's absorption and dispersion spectrum in the Mid-IR using a MZI is, to the best of our knowledge, yet pending. The reader is, however, pointed to infrared spectroscopic ellipsometry [19] and dispersive Fourier transform spectroscopy [20,21,22] that were used in (far-) infrared spectroscopic measurements of the complex dielectric function, mostly in reflection measurements.…”
Section: 29 Page 2 Ofmentioning
confidence: 99%
“…A photograph of the reader, a diagram of on-chip components, and the results of the biomolecular interaction in case of C-reactive protein is given [319]. An interesting idea is the migration of the Mach-Zehnder chemical sensor and biosensor to the mid-infrared region (MIR) as has been done in the application of the new device for the detection of the herbicide simazine [320,321]. By these means, selectivity information of MIR and sensitivity of Mach-Zehnder can be combined.…”
Section: Dual Pathwaymentioning
confidence: 99%