On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity

Ahn, Myoung Won; Park, K.-S.; Heo, Jeong Hoon; Kim, D.-W.; Choi, Kihwan; Park, J.-G.

doi:10.1016/j.snb.2009.02.008

Cited by 315 publications

(145 citation statements)

References 27 publications

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“…10 The bottom electrodes are best fabricated first and then the ZnO nanostructures are grown between the electrodes on-chip for gas measurement. [11][12][13] Recently, ZnO nanowires have been selectively grown between Pt electrodes by CVD on discrete Au islands and used for gas sensing of NO 2 and ethanol. 14 Recently, we successfully grew ZnO nanorods via the hydrothermal method on-chip at 85°C and found that the nanorods have good sensitivity and selectivity to NO 2 .…”

Section: Introductionmentioning

confidence: 99%

Comparison of NO2 Gas-Sensing Properties of Three Different ZnO Nanostructures Synthesized by On-Chip Low-Temperature Hydrothermal Growth

Jiao

Duy

Trung

et al. 2017

Journal of Elec Materi

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Three different ZnO nanostructures, dense nanorods, dense nanowires, and sparse nanowires, were synthesized between Pt electrodes by on-chip hydrothermal growth at 90°C and below. The three nanostructures were characterized by scanning electron microscopy and x-ray diffraction to identify their morphologies and crystal structures. The three ZnO nanostructures were confirmed to have the same crystal type, but their dimensions and densities differed. The NO 2 gas-sensing performance of the three ZnO nanostructures was investigated at different operation temperatures. ZnO nanorods had the lowest response to NO 2 along with the longest response/recovery time, whereas sparse ZnO nanowires had the highest response to NO 2 and the shortest response/recovery time. Sparse ZnO nanowires also performed best at 300°C and still work well and fast at 200°C. The current-voltage curves of the three ZnO nanostructures were obtained at various temperatures, and the results clearly showed that sparse ZnO nanowires did not have the linear characteristics of the others. Analysis of this phenomenon in connection with the highly sensitive behavior of sparse ZnO nanowires is also presented.

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Section: Introductionmentioning

confidence: 99%

Comparison of NO2 Gas-Sensing Properties of Three Different ZnO Nanostructures Synthesized by On-Chip Low-Temperature Hydrothermal Growth

Jiao

Duy

Trung

et al. 2017

Journal of Elec Materi

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“…Furthermore, ZnO as a bio safe compound is found to be useful in applications linked to human life, such as in cosmetic, medical, and dental products [1,2]. It has become one of the most promising compounds that can be employed in advance technology applications, and it demonstrates outstanding performance in various application fields, such as sensors for different analytics including those for hydrogen, oxygen, Volatile organic compounds (VOCs) [3][4][5], urea, cholesterol, and glucose [6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

“…The ZnO nanostructure forms are favourable over the thin film form, especially in nano-size device applications. Furthermore, it demonstrates a higher specific surface when compared with the thin film form [3,7,8,10].…”

Section: Introductionmentioning

confidence: 99%

Ultraviolet Sensors Based on Two-Dimensional Zinc Oxide Structures

Al-Hardan¹,

Hamid²,

RoslindaShamsudin³

et al. 2017

Optoelectronics - Advanced Device Structures

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In this chapter, we review the application of zinc oxide (ZnO) in ultraviolet (UV) sensing and emphasise on the two-dimensional (2D) ZnO structures. The synthesis of 2D ZnO structures, the morphologies, and the photoluminescence emission will be reviewed and highlighted. The performance of the UV sensors based on 2D ZnO structures is explored. The lack in the study of the 2D ZnO UV sensors might be due to the difficulties of controlling the growth of the 2D ZnO compared to the one-dimensional (1D) ZnO structures.

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“…These advantages are of considerable interest for practical applications such as, gas sensors [1,2], piezoelectric devices [3], surface acoustic wave devices [4], solar cells [5][6][7][8],etc. Recently, ZnO thin films have been used as a window layer and contact layer for thin film solar cells with Cu(In,Ga)S 2 or Cu(In,Ga)Se 2 absorber material.…”

Section: Introductionmentioning

confidence: 99%

Effect of Al-doped on physical properties of ZnO Thin films grown by spray pyrolysis on SnO₂: F/glass

Ajili

Jebbari

Kamoun‐Turki

et al. 2012

EPJ Web of Conferences

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Abstract. Transparent conducting thin films of aluminum-doped zinc oxide (ZnO:Al) have been deposited on SnO 2 :F/glass by the chemical spray technique, starting from zinc acetate (CH 3 CO 2 ) 2 Zn.2H 2 O and aluminum chloride AlCl 3 . The effect of changing the aluminum-to-zinc ratio y from 0 to 3 at.%, has been thoroughly investigated. It was found that the optical and electrical properties of Al doped ZnO films improved with the addition of aluminum in the spray solution until y=2%. At this Al doping percentage, the thin layers have a resistivity equal to 4.1 x 10 -4 Ω.cm and a transmittance of about 90 % in the region [600-1000] nm. XRD patterns confirm that the films have polycristalline nature and a wurtzite (hexagonal) structure which characterized with (100), (002) and (101) principal orientations. The undoped films have (002) as the preferred orientation but Al doped ones have (101) as the preferred orientation. Beyond y= 1%, peak intensities decrease considerably.

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On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity

Cited by 315 publications

References 27 publications

Comparison of NO2 Gas-Sensing Properties of Three Different ZnO Nanostructures Synthesized by On-Chip Low-Temperature Hydrothermal Growth

Comparison of NO2 Gas-Sensing Properties of Three Different ZnO Nanostructures Synthesized by On-Chip Low-Temperature Hydrothermal Growth

Ultraviolet Sensors Based on Two-Dimensional Zinc Oxide Structures

Effect of Al-doped on physical properties of ZnO Thin films grown by spray pyrolysis on SnO₂: F/glass

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On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity

Cited by 315 publications

References 27 publications

Comparison of NO2 Gas-Sensing Properties of Three Different ZnO Nanostructures Synthesized by On-Chip Low-Temperature Hydrothermal Growth

Comparison of NO2 Gas-Sensing Properties of Three Different ZnO Nanostructures Synthesized by On-Chip Low-Temperature Hydrothermal Growth

Ultraviolet Sensors Based on Two-Dimensional Zinc Oxide Structures

Effect of Al-doped on physical properties of ZnO Thin films grown by spray pyrolysis on SnO2: F/glass

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Effect of Al-doped on physical properties of ZnO Thin films grown by spray pyrolysis on SnO₂: F/glass