On characterization of a generic lithography machine in a multi-directional space

A suppress-excite approach for online trajectory generation of uncertain motion systems

“…In this study, a single (S) input (I) and single (S) output (O), i.e., SISO, stage motion is handled. Dealing with other system input-output combinations, namely SIMO, MISO, and MIMO to obtain digital twins [67] of multi-directional motion stages based on data-driven modeling and controller synthesis [68], or first principles modeling [32] will be investigated in separate studies.…”

“…An example from semiconductor manufacturing is depicted in Fig. 1 where the wafer scanner time-domain modeling is detailed in [32].…”