1998
DOI: 10.1016/s0168-583x(98)00057-3
|View full text |Cite
|
Sign up to set email alerts
|

On carbon nitride synthesis at high-dose ion implantation

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
4
0

Year Published

2006
2006
2012
2012

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 14 publications
(4 citation statements)
references
References 12 publications
0
4
0
Order By: Relevance
“…The Mo here can be from the molybdenum screens of the vacuum furnace. The simulation of the RBS spectra with the NBS code [7] shows that the experimental spectra correspond to a backward scattering on a lay ered structure, of which the first layer has the thickness of 0.5 μm and consists of Mo 0.5 Ti, and the second layer has the thickness of 1 μm and the composition Mo 0.3 Ti. The second layer may have a more complex composition and may also contain Ni, which is present in the equiatomic initial alloy TiNi.…”
Section: Resultsmentioning
confidence: 99%
“…The Mo here can be from the molybdenum screens of the vacuum furnace. The simulation of the RBS spectra with the NBS code [7] shows that the experimental spectra correspond to a backward scattering on a lay ered structure, of which the first layer has the thickness of 0.5 μm and consists of Mo 0.5 Ti, and the second layer has the thickness of 1 μm and the composition Mo 0.3 Ti. The second layer may have a more complex composition and may also contain Ni, which is present in the equiatomic initial alloy TiNi.…”
Section: Resultsmentioning
confidence: 99%
“…The elemental analysis was produced by the Rutherford backscattering (RBS) of He + ions with the energy 2 MeV at an angle of 160°. Computer simulation of the RBS spectra was performed using the NBS program [16]. It is found that before irradiation the carbon and silicon concentrations in the surface layer were approx imately 49.3%, moreover, there is argon (~1.4%) in the composition, and the situation was similar after irradia tion [4].…”
Section: Study Of the Physical Sputtering Of A Carbon Ceramic Composimentioning
confidence: 99%
“…However, even amorphous carbon nitride layers may have suitable physical properties for the use in many tribological applications, for instance as protective coatings. A wide variety of elaboration techniques have been used such as reactive sputtering, chemical vapour deposition, pyrolysis of organic materials, laser deposition and ion implantations [2][3][4][5][6][7][8]. So far, whatever the technique employed, mixed phase layers are quite often obtained and it remains very difficult to achieve fully crystalline phase formation.…”
Section: Introductionmentioning
confidence: 99%