2019
DOI: 10.11591/ijaas.v8.i3.pp195-203
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On approach for homogeneity increasing of films grown from the gas phase with account natural convection and changes in the rate of chemical interaction between materials

Abstract: <span>We analyzed growth of films by gas phase epitaxy. Based on the analysis we formulate conditions to increase of homogeneity of properties of obtained films. We also present an analytical approach for analysis processes framework gas phase epitaxy with account natural convection and the possibility of changing the rate of chemical interaction between reagents.</span>

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“…An evolution of films by gas stage epitaxy has been investigated in [31]. Established by the study, they express circumstances for enhancing the similarity of the belongings of the films gained.…”
Section: Onshore Oil Spills (Land Spills)mentioning
confidence: 99%
“…An evolution of films by gas stage epitaxy has been investigated in [31]. Established by the study, they express circumstances for enhancing the similarity of the belongings of the films gained.…”
Section: Onshore Oil Spills (Land Spills)mentioning
confidence: 99%