OLED and Other Emissive Microdisplays

Underwood, Ian

doi:10.1007/978-3-540-79567-4_130

Handbook of Visual Display Technology 2012

DOI: 10.1007/978-3-540-79567-4_130

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OLED and Other Emissive Microdisplays

Ian Underwood

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2020

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Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-Processing of Foundry CMOS Chips

Tsiamis

Dunare

et al. 2020

J. Microelectromech. Syst.

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This paper details and compares the technology options for post-processing foundry produced CMOS at chipscale to enable More than Moore functionality. In many cases there are attractions in using chip-based processing through the Multi-Project Wafer route that is frequently employed in research, early-stage development and low-volume production. This paper identifies that spray-based photoresist deposition combined with optical maskless lithography demonstrates sufficient performance combined with low cost and operational convenience to offer an attractive alternative to conventional optical lithography, where spin-coated photoresist is exposed through a patterned photomask.

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Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-Processing of Foundry CMOS Chips

Tsiamis

Dunare

et al. 2020

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

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OLED and Other Emissive Microdisplays

Cited by 1 publication

References 21 publications

Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-Processing of Foundry CMOS Chips

Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-Processing of Foundry CMOS Chips

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