1996
DOI: 10.1016/0038-1101(95)00144-1
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Ohmic contacts to n-type and p-type GaSb

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Cited by 17 publications
(9 citation statements)
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“…22 I-V sweeps showed that Ohmic contacts were established. To prevent the film from becoming shorted accidentally, the GaSb thin film is etched away around the edges of the sample by Cl 2 / Ar 2 based reactive ion etching ͑Ref.…”
Section: Comparison To Experimentsmentioning
confidence: 98%
“…22 I-V sweeps showed that Ohmic contacts were established. To prevent the film from becoming shorted accidentally, the GaSb thin film is etched away around the edges of the sample by Cl 2 / Ar 2 based reactive ion etching ͑Ref.…”
Section: Comparison To Experimentsmentioning
confidence: 98%
“…The electrical properties of ohmic contacts are defined by specific transfer resistance and specific contact resistance. Specific contact resistances should be smaller than 10 -4 Ω-cm -2 to be considered as ohmic, but, values in the 10 -6 to 10 -7 range are preferable [16][17][18][19] .…”
Section: Introductionmentioning
confidence: 99%
“…Because, at the surface of this material, the Fermi level is pinned near the conduction band [19] and it can be highly doped up to 1 Â 10 20 cm 23 by using Te as a dopant [17]. In fact, high doping is necessary for the ohmic contacts in order to make the depletion region at the metal -semiconductor interface thin enough to enable carrier tunnelling [20]. This is displayed in Fig.…”
Section: Introductionmentioning
confidence: 99%