Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography

Goray, Leonid I.

doi:10.1117/12.678151

Cited by 3 publications

References 16 publications

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Rigorous accounting diffraction on non-plane gratings irradiated by non-planar waves

Goray¹

2022

J. Opt.

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The modified boundary integral equation method (MIM) is considered a rigorous theoretical application for the diffraction of cylindrical waves by arbitrary profiled plane gratings, as well as for the diffraction of plane/non-planar waves by concave/convex gratings. This study investigates two-dimensional (2D) diffraction problems of the filiform source electromagnetic field scattered by a plane lamellar grating and of plane waves scattered by a similar cylindrical-shaped grating. Unlike the problem of plane wave diffraction by a plane grating, the field of a localised source does not satisfy the quasi-periodicity requirement. Fourier transform is used to reduce the solution of the problem of localised source diffraction by the grating in the whole region to the solution of the problem of diffraction inside one Floquet channel. By considering the periodicity of the geometry structure, the problem of Floquet terms for the image can be formulated so that it enables the application of the MIM developed for plane wave diffraction problems. Accounting of the local structure of an incident field enables both the prediction of the corresponding efficiencies and the specification of the bounds within which the approximation of the incident field with plane waves is correct. For 2D diffraction problems of the high-conductive plane grating irradiated by cylindrical waves and the cylindrical high-conductive grating irradiated by plane waves, decompositions in sets of plane waves/sections are investigated. The application of such decomposition, including the dependence on the number of plane waves/sections and radii of the grating and wave front shape, was demonstrated for lamellar, sinusoidal and saw-tooth grating examples in the 0th & –1st orders as well as in the transverse electric and transverse magnetic polarisations. The primary effects of plane wave/section partitions of non-planar wave fronts and curved grating shapes on the exact solutions for 2D and three-dimensional (conical) diffraction problems are discussed.

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Rigorous accounting diffraction on non-plane gratings irradiated by non-planar waves

Goray¹

2022

J. Opt.

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Diffraction gratings for short-wave radiation: Modern requirements and achievements

Goray

2013

Bull. Russ. Acad. Sci. Phys.

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Diffraction Grating Groove Metrology Using AFM and STM

Goray¹

2022

Recent Developments in Atomic Force Microscopy and Raman Spectroscopy for Materials Characterization

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AFM & STM metrology has been around for a long time, and especially intense since it has been awarded by the Nobel Prize in Physics in 1986. Since then, many AFM & STM groove profile measurements on surface relief diffraction gratings have been presented. However, a wide review of the results of the use of AFM & STM methods for groove metrology of various surface relief gratings has not really been undertaken. The following problems are discussed in this chapter: the cantilever tip deconvolution, geometry, and radius; groove shapes and abrupt groove slopes; roughness; PSD functions; etc. Also, the author demonstrates comparisons with other widely-used metrology techniques and examples of AFM & STM data of bulk, coated, and multilayer-coated ruled, or holographic, or lithographic gratings having realistic groove profiles. These gratings were chosen because high quality efficiency data exists, in particular, for space gratings or/and X-ray gratings characterized by synchrotron radiation sources; and their groove profiles, together with random nanoroughness, were measured by AFM or STM to be included in rigorous efficiency and scattered light intensity calculus. In the present chapter, both the earlier published results and the recent, non-published yet results are described and discussed.

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Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography

Cited by 3 publications

References 16 publications

Rigorous accounting diffraction on non-plane gratings irradiated by non-planar waves

Rigorous accounting diffraction on non-plane gratings irradiated by non-planar waves

Diffraction gratings for short-wave radiation: Modern requirements and achievements

Diffraction Grating Groove Metrology Using AFM and STM

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