Off-Line Quality Control in Integrated Circuit Fabrication using Experimental Design

Phadke, M. S.; Kackar, Raghu N.; Speeney, D. V.; Grieco, Michael J.

doi:10.1007/978-1-4684-1472-1_6

Cited by 59 publications

(43 citation statements)

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“…In such a case the performance value corresponding to optimum working conditions can be predicted by utilizing the balanced characteristic of OA. For this, the additive model may be used (Phadke, 1983): where m is the overall mean of performance value, X i the fixed effect of the parameter level combination used in i th experiment, and e i the random error in i th experiment. Because Equation (4) is a point estimation, which is calculated by using experimental data in order to determine whether results of the confirmation experiments are meaningful or not, the confidence interval must be evaluated.…”

Section: Methodsmentioning

confidence: 99%

Determination of the Optimum Conditions for Zinc Extraction from Ore Containing Sphalerite by HCL Solutions

et al. 2002

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The Taguchi method has been used to determine optimum conditions for the zinc and iron extraction from ore containing sphalerite by HCI solutions. After determining the important parameters in extraction efficiency, an experimental series with two steps was carried out. The optimum conditions for the first series of experiments were found to be reaction temperature 90°C, solid‐to‐liquid ratio 0.091 g/mL, acid concentration 25 mass%, particle size ‐100+200 mesh, stirring speed 300 rpm and reaction time 120 min. Under these conditions, zinc extraction efficiency from ore was approximately 60%. The optimum conditions for the second series of experiments were found to be reaction temperature 90°C, acid concentration 32.5 mass%, solid‐to‐liquid ratio 0.1 g/mL, and reaction time 180 min. Under these conditions, zinc extraction efficiency from the ore was approximately 100%. Alternative working conditions reducing the total cost were also determined.

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Section: Methodsmentioning

confidence: 99%

Determination of the Optimum Conditions for Zinc Extraction from Ore Containing Sphalerite by HCL Solutions

et al. 2002

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“…In such cases, the performance value corresponding to optimum working conditions can be predicted by utilizing the balanced characteristic of the OA. For this aim, the additive model may be used [7] …”

Section: Experimental Parameters and Planmentioning

confidence: 99%

Determination of Heat and Flow Characteristics in Spray Cooling with Rectangular Finned Heat Sink

Karabey¹,

Yakut²

2017

Proceedings ILASS–Europe 2017. 28th Conference on Liquid Atomization and Spray Systems

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Spray cooling process has many parameters such as extended surface, angle of inclination, effect of gravity, diameter of nozzle, angle of spray, mass flux, geometry of cooled surface, thermal performance and critical heat flux of spray etc. Many effective parameters to carry out the experiments with conventional test methods are both expensive and time consuming. As a solution in these circumstances, Taguchi method, which is one of the modern experimental design and optimization methods and very effective in solving such problems, was used in this study. Taguchi method, as well as being in effective to improve the quality of products, also gives the opportunity to achieve better results with much less experiment. Using Taguchi method, as well as to reach the target value exactly, the sensitivity of the design against uncontrollable factors is reduced to a minimum. Thus, the optimum tolerance range in cost and quality factors is determined. When compared to conventional experimental design methods, Taguchi method has many advantages. In these experiments with using rectangular pin fin heat sinks, the effects of the longitudinal and lateral distances of the consecutively arranged nozzle or diffuser-like fin pairs, widths of the fins, angle of fins, heights of fins, spraying time, air flow rate, liquid flow rate (ALR, the ratio of air-liquid flow rate) and the ratio of the nozzle-heat sink distance to the nozzle diameter (h/d) on heat and flow characteristics have been investigated by using Taguchi experimental design method. For this reason, characteristics of flow and heat transfer are considered separately. Nusselt number considered as performance statistic, L27(3 11 ) orthogonal array has been selected as an experimental design plan for the eleven parameters mentioned above. The Nusselt number was calculated by taking into account the characteristic length of heat sink and the optimized results were found to be fin width of 45 mm, fin angle of 45 IntroductionAtomization is used to transfer energy from wide surface areas in low temperatures throughout cooling applications. From the outlet of an atomizer, an unsteady liquid mass performs a fragmentation process respectively in the order of layer formation, ligament formation, and droplet formation. The velocity and diameter rates of the droplets to compose spray are important. When the droplets with a certain speed and diameter range are grouped, the droplet speed and diameter range occur, and these two ranges are fundamental to characterizing the spray. Effective energy transfer is ensured with spray cooling, a technology characterized by high heat transfer, heat convection homogeneity, and a low droplet impact speed, which are explored for engineering applications today. Having gained momentum especially in the last 20 years, studies on the atomization of liquids have been used widely in industry. The cooling of metal surfaces and electronic components, drying operations, humidification, washing, watering and fire extinguishing operations, pulverized f...

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“…In the Taguchi method, if the experiment corresponding to optimum working conditions is not present in the experiment plan, the performance value can be estimated with the help of the following equation [22].…”

mentioning

confidence: 99%

“…Since Equation (6) is an estimation calculated by using experimental data in order to determine whether the additional model is appropriate, the confidence interval for the estimated error needs to be evaluated [22]. The estimated error is the difference between the observed p and the estimated p. The confidence interval (S e ) for the estimated error is found with the help of the following equation.…”

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confidence: 99%

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Optimization by Using Taguchi Method of the Production of Magnesium-Matrix Carbide Reinforced Composites by Powder Metallurgy Method

Küçük

Elfarah

Islak

et al. 2017

Metals

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Abstract:The aim of this study was to determine the optimum production parameters in the production of magnesium matrix carbide-reinforced composites by using the powder metallurgy method. The parameter levels maximizing density (%), hardness (HB10), and bending strength (MPa) values were found by using the Taguchi method. The type of reinforcement, the amount of reinforcement, the sintering time, the sintering temperature, additive type, and additive rate were selected as the production parameters. Since the production of Mg and its alloys by using casting methods is problematic, the hot pressing method, a powder metallurgy method, was preferred in this study. Ceramic-based carbide particles were used as reinforcing materials in Mg matrix composite materials. B 4 C, SiC, Mo 2 C, and TiC carbides were preferred as the carbide. Microstructure and phase composition of the produced materials was examined with scanning electron microscope (SEM), X-ray diffractogram (XRD) and X-ray energy dispersive spectrometry (EDS). The hardness of the materials was measured by using a Universal Hardness device. The relative densities of the materials were determined according to Archimedes' principle. The bending strength properties of the materials were determined by using the three-point bending test. The optimum conditions were a sintering temperature of 500 • C, sintering duration of 5 min, additive type of B 4 C and additive rate of 2.5%, and the results obtained at these conditions were found to be as follows; relative density of 98.74 (%), hardness of 87.16 HB10 and bending strength of 193.65 MPa. SEM images taken from the fracture surfaces showed that the carbides added to the matrix had a relatively homogeneous distribution. XRD analyses revealed that the matrix was oxidized very little, and no phase formation occurred between the matrix and the carbides. Carbide addition caused a distinct hardness increase by showing the effect of distribution strengthening in the matrix.

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Off-Line Quality Control in Integrated Circuit Fabrication using Experimental Design

Cited by 59 publications

References 1 publication

Determination of the Optimum Conditions for Zinc Extraction from Ore Containing Sphalerite by HCL Solutions

Determination of the Optimum Conditions for Zinc Extraction from Ore Containing Sphalerite by HCL Solutions

Determination of Heat and Flow Characteristics in Spray Cooling with Rectangular Finned Heat Sink

Optimization by Using Taguchi Method of the Production of Magnesium-Matrix Carbide Reinforced Composites by Powder Metallurgy Method

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