Off-centering reduction of coplanar micro liquid lens using a thickness-gradient dielectric

Park, Yangkyu; Seo, Seungwan; Lee, Jong‐Hyun

doi:10.1109/omems.2012.6318876

2012 International Conference on Optical MEMS and Nanophotonics 2012

DOI: 10.1109/omems.2012.6318876

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Off-centering reduction of coplanar micro liquid lens using a thickness-gradient dielectric

Yangkyu Park

Seungwan Seo

Jong‐Hyun Lee

Abstract: We have fabricated coplanar liquid lens having dielectric layer with thickness gradient, which was realized using reflow process of photoresist, demonstrating that the off-centering error was 20um that is considerably smaller than geometrical centering.

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Off-centering reduction of coplanar micro liquid lens using a thickness-gradient dielectric

Abstract: We have fabricated coplanar liquid lens having dielectric layer with thickness gradient, which was realized using reflow process of photoresist, demonstrating that the off-centering error was 20um that is considerably smaller than geometrical centering.

Cited by 0 publications

References 3 publications

No citations

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