Off-axis aberration estimation in an EUV microscope using natural speckle

Shanker, Aamod; Wojdyla, Antoine; Gunjala, Gautam; Dong, Jonathan; Benk, Markus P.; Neureuther, A. R.; Goldberg, Kenneth A.; Waller, Laura

doi:10.1364/isa.2016.ith1f.2

Cited by 1 publication

(1 citation statement)

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“…Both parts of our algorithm rely on analysis of each image's Fourier transform to recover illumination angles. Fourier domain pupil analysis of intensity images has been used previously to deduce imaging system aberrations [37] and determine the center of diffraction patterns [38,39] for system calibration. We show here that the individual Fourier spectra can be used to determine illumination angle.…”

Section: Methodsmentioning

confidence: 99%

Efficient illumination angle self-calibration in Fourier ptychography

2018

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Fourier ptychography captures intensity images with varying source patterns (illumination angles) in order to computationally reconstruct large space-bandwidth-product images. Accurate knowledge of the illumination angles is necessary for good image quality; hence, calibration methods are crucial, despite often being impractical or slow. Here, we propose a fast, robust, and accurate self-calibration algorithm that uses only experimentally collected data and general knowledge of the illumination setup. First, our algorithm makes a fast direct estimate of the brightfield illumination angles based on image processing. Then, a more computationally intensive spectral correlation method is used inside the iterative solver to further refine the angle estimates of both brightfield and darkfield images. We demonstrate our method for correcting large and small misalignment artifacts in 2D and 3D Fourier ptychography with different source types: an LED array, a galvo-steered laser, and a high-NA quasi-dome LED illuminator.

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Section: Methodsmentioning

confidence: 99%