DOI: 10.1115/1.4035940
View full text

Abstract: Auto refrigerant cascade (ARC) refrigerators are used extensively in the semiconductor manufacturing industry to provide refrigeration in the temperature range of 80–150 K. The performance of the ARC refrigerator depends on the mixture composition, operating pressures, etc. ARC refrigerators employ one or more liquid–vapor phase separators to separate the compressor lubricating oil and the condensed high boiling components and return to the compressor at an intermediate temperature to prevent freezing of the c…

Expand abstract