“…At low fluences, in the “submelting” regime, laser irradiation could cause material damage through thermal stresses . After repetitive irradiation, the accumulated damage manifests itself through the formation of slip bands, increase in the surface roughening, and corresponding reflectivity changes. , At higher fluences, a thin surface layer may undergo rapid melting followed by epitaxial resolidification, leading to the generation of a high density of crystal defects, such as vacancies, dislocations, stacking faults and twin boundaries. ,, Further increase in laser fluence can lead to more extensive microstructural changes and modifications of surface morphology, including the generation of subsurface voids trapped by rapidly advancing solidification front, formation of a nanocrystalline surface layer, or surface nanospikes featuring pentagonal twinned structural elements. , The microstructural changes in this regime can extend down to a substantial depth under the irradiated surface, with laser-induced shear stresses producing deformation twins and dislocations far below the region experiencing laser melting and ablation.…”