Observation of the phase formation in TiO2 nano thin film by Raman scattering

Abstract

Two groups of TiO 2 thin films were deposited onto Corning glass substrates by the RF magnetron sputtering in reactive argon gas containing 20% oxygen and by the sol-gel technique combined with dip coating. The films prepared by RF sputtering were annealed for 15 min at 650 • C with different rates of increase of temperature with the aim to search for the TiO 2 anatase phase formation. Besides, with the same aim, a set of the TiO 2 films prepared by sol-gel technique was doped with Co in the concentration range from 0 to 8% by weight. Influence of the rate of increase of temperature and Co doping on the anatase phase formation have been observed and estimated by x-ray diffraction and Raman scattering. Structure deformation induced by rapid heating and Co doping is considered as the main reason affecting the anatase phase formation in TiO 2 thin films.

Niobium‐doped TiO2 films as window layer for chalcopyrite solar cells

“…The fact that the thermodynamically more stable Rutile-phase is created first, can be attributed to the high energy of the sputtered particles that is usually about 5 eV [13]. This is also reported elsewhere [37]. In general, reactive sputtering of crystalline TiO 2 -films at temperatures below 500 K is a difficult task.…”

Solution processing of transparent conductors: from flask to film

“…The phases are distinguishable by XRD and Raman spectroscopy. [225][226][227][228] For TCO applications, the anatase phase is desired because it allows for higher conductivity. The effective electron mass in anatase (m à e ¼$ 1 m o ) is significantly lower than in rutile (m à e ¼ 8 À 20 m o ), which accounts for the experimentally observed higher mobility of anatase over rutile.…”

Raman spectroscopy of sol–gel derived titanium oxide thin films

“…amorphous to crystalline phase transitions, oxygen defects, stress states and quantum size effects in transition‐metal oxides 13–17. In the study of TiO 2 by Raman spectroscopy, the transformations of nanocrystalline phases, a shift in the peak position and an increase in the full width at half‐maximum (FWHM) of the E g mode (144 cm −1 ) have been widely reported 18–25. In general, most of these studies have focused on powders of TiO 2 .…”