Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate

Bae, Namjae; Kim, Nam-Kyun; Lee, Haneul; Jang, Yunchang; Park, Seolhye; Kim, Gon-Ho

doi:10.1016/j.cap.2024.01.014

Current Applied Physics

2024

DOI: 10.1016/j.cap.2024.01.014

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Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate

Namjae Bae,

Nam-Kyun Kim,

Haneul Lee

et al.

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Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate

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References 15 publications

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