We have observed the growth mode transition from two-dimensional ͑2D͒ layer-by-layer to step-flow in the earliest stage growth of heteroepitaxial SrRuO 3 thin films on TiO 2 -terminated ͑001͒ SrTiO 3 substrates by in situ high pressure reflective high energy electron diffraction ͑RHEED͒ and atomic-force microscopy. There is no RHEED intensity recovery after each laser pulse in the first oscillation when the growth mode is 2D layer-by-layer. On the other hand, it is getting more pronounced in the second oscillation, and finally reaches a dynamic steady state in which the growth mode is completely changed into the step-flow mode. The origin of the growth mode transition can be attributed to a change in the mobility of adatoms and switching the surface termination layer from the substrate to the film. SrRuO 3 thin films with an atomically smooth surface grown by atomic layer control can be used in oxide multilayered heterostructure devices.