Observation of high dielectric constant of Bi-Nb-O&lt;sub&gt;x&lt;/sub&gt; thin-film capacitors fabricated by chemical solution deposition process

Onoue, Masatoshi; Miyasako, Takaaki; Tokumitsu, Eisuke; Shimoda, Tatsuya

doi:10.1587/elex.11.20140651

Cited by 4 publications

(1 citation statement)

References 25 publications

(33 reference statements)

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“…Moreover, we found that these BNO films have a cubic pyrochlore structure. [22][23][24] Although it is known that BZN has a pyrochlore structure, such a structure has not been reported for BNO films. 25,26) This finding suggests that a new crystal phase can be formed in BNO films using a CSD method.…”

Section: Introductionmentioning

confidence: 99%

High-relative-dielectric-constant bismuth–niobium–oxide films prepared using Nb-rich precursor solution

Ariga

Inoue

Matsumoto

et al. 2015

Jpn. J. Appl. Phys.

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Various ceramic materials have been developed for electronic devices. Bismuth-niobium-oxide (BNO) films prepared by a chemical solution deposition (CSD) method have the cubic pyrochlore phase, high relative dielectric constant, and low tangent loss (tan δ). We found that a BNO cubic pyrochlore crystal was Nb-rich, even though its pyrochlore formula is A 2 B 2 O 7 . The crystallization temperature of BNO increased with increasing Nb ratio. The relative dielectric constants of BNO films were related to the Nb ratio in the precursor solution. The dielectric constant of the BNO films was 250 when the Bi and Nb ratios in BNO precursor solutions were 4 and 6, respectively, and the sintering temperature was 600°C. In addition, the tan δ was less than 0.01 at 1 kHz, which is higher than the reported values of BNO systems despite using the CSD method. These results show that the properties of BNO films prepared by the CSD method were associated with the Nb ratio in the precursor solution. Furthermore, the dielectric characteristics indicated that the Nb-rich BNO films have potential applications in electronic devices.

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Section: Introductionmentioning

confidence: 99%

High-relative-dielectric-constant bismuth–niobium–oxide films prepared using Nb-rich precursor solution

Ariga

Inoue

Matsumoto

et al. 2015

Jpn. J. Appl. Phys.

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Synthesis and Optical Properties of Different Bismuth Niobate Films Grown by Dual Magnetron Co‐Sputtering

Depablos-Rivera

Zeinert

Rodil³

2018

Adv Eng Mater

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The interest about the synthesis of bismuth niobates (BNOs) in a thin‐film form has recently grown since their optical and electrical properties are attractive for applications such as photocatalysis, sensors, and fuel cells. The aim of this work is to demonstrate the successful synthesis of different BNOs as films using dual confocal magnetron co‐sputtering deposition, and evaluate properly their optical properties. Two independent targets of α‐Bi2O3 and Nb are used. Crystalline as‐deposited films are obtained at Nb contents ≤9.2 at%. Meanwhile, films grow amorphous for Nb contents >9.2 at%. However, amorphous films are crystallized after annealing obtaining BNOs in compliance with the as‐grown composition. There is a good reproducibility and correlation between the films structure and composition that is controlled through the variation of the power applied to the Nb target. The following niobates are obtained: solid solutions with 5.1–6.6 at% Nb and II‐Bi3NbO7, Bi5Nb3O15, and the mixture of α‐BiNbO4(76 wt%) + β‐BiNbO4(24 wt%). The optical properties of the BNOs are estimated from the data measured by UV‐Visible‐NIR transmittance and reflectance spectrometry. It is shown that all the films have refractive indexes n>2 and optical gaps between 1.67 and 3.34 eV, depending on the Nb content and phase.

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Novel Materials Proper to Liquid Process

Shimoda

2019

Nanoliquid Processes for Electronic Devices

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Observation of high dielectric constant of Bi-Nb-O<sub>x</sub> thin-film capacitors fabricated by chemical solution deposition process

Cited by 4 publications

References 25 publications

High-relative-dielectric-constant bismuth–niobium–oxide films prepared using Nb-rich precursor solution

High-relative-dielectric-constant bismuth–niobium–oxide films prepared using Nb-rich precursor solution

Synthesis and Optical Properties of Different Bismuth Niobate Films Grown by Dual Magnetron Co‐Sputtering

Novel Materials Proper to Liquid Process

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