Abstract:This work investigates dislocation etch pits in epitaxial lateral overgrowth (ELO) GaN by wet chemical etching. A mixture of H2SO4 and H3PO4 was used as a dislocation etchant, and SEM and AFM were employed to observe the surface topography. For the as-grown sample, SEM images present the flat, smooth surface without any pits or hillocks. After the chemical etching, hexagonal shaped etch pits were observed at the edge of ELO GaN. AFM observation of etched ELO GaN displayed high densities of etch pits clustered … Show more
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