1973
DOI: 10.1080/00337577308232122
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Observation of clusters in a sputtering ion source

Abstract: This paper reports previously unpublished results which were obtained in 1966. We systematically investigated the dependence of cluster ion intensities on the bombarding gases He+, Ar+ and Xe' (energies: 4 to 12 keV, current densities: 100 mA/cm2 ). Frequently, the observed structures in the relative cluster intensities were quite puzzling, e.g. for A1 and Si. Attempts to correlate these structures to crystal configurations failed, nor did any pattern develop from simple valency considerations alone. Initial i… Show more

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Cited by 96 publications
(8 citation statements)
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“…Secondary ions were accelerated to a nominal energy of 4.5 keV and filtered by an electrostatic sector and a magnetic analyzer. Herzog et al [1973] have shown that secondary molecular ions (dimers, oxides, hydrides, etc.) have distinctly lower initial kinetic energy when leaving the sample surface than monoatomic species and that these undesirable molecular ions can be eliminated from the secondary ion mass spectrum by reducing the secondary accelerating voltage by an amount comparable to their initial kinetic energy.…”
Section: Ion Microprobe Techniquesmentioning
confidence: 99%
“…Secondary ions were accelerated to a nominal energy of 4.5 keV and filtered by an electrostatic sector and a magnetic analyzer. Herzog et al [1973] have shown that secondary molecular ions (dimers, oxides, hydrides, etc.) have distinctly lower initial kinetic energy when leaving the sample surface than monoatomic species and that these undesirable molecular ions can be eliminated from the secondary ion mass spectrum by reducing the secondary accelerating voltage by an amount comparable to their initial kinetic energy.…”
Section: Ion Microprobe Techniquesmentioning
confidence: 99%
“…Metal atom clusters have also been observed in rf-spark sources [3] and in sputtering ion sources [4].…”
Section: Introductionmentioning
confidence: 99%
“…These are called Magic Numbered Clusters. 28 For clusters intermediate in size between the magic numbers, the excess particles reside on the surface of a dense icosahedral cluster. Dense icosahedral clusters are solidlike at low temperatures because the atoms vibrate about a single minimum on the potential surface.…”
Section: Structuresmentioning
confidence: 99%