Observation of Characteristics of Magnetic Neutral Loop Discharge Plasma Appearing at Antenna in RF Circuit

Tsuboi, Hideo; Ogata, Seiji

doi:10.1143/jjap.46.7475

Cited by 9 publications

(11 citation statements)

References 9 publications

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“…This is also explained in section 3.4. Tsuboi and Ogata (2007) presented an equivalent circuit model to evaluate the power deposition into an Ar NLD plasma. In the model, the NLD plasma was regarded as a ring conductor inductively coupled with an rf antenna.…”

Section: Electron Fluxmentioning

confidence: 99%

Rectification effect of gradient antiparallel magnetic fields on electron conduction in a gas under a radio-frequency electric field

Sugawara¹,

Osaga²,

Yamamoto³

2011

Plasma Sources Sci. Technol.

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Electron transport in CF 4 under linearly gradient antiparallel magnetic fields was analysed in order to investigate the fundamental properties of magnetic neutral loop discharge plasmas used for material processing. The electron motion was simulated by a Monte Carlo method under a radio-frequency (rf) electric field applied perpendicularly to both the directions of the magnetic field and its gradient. Two typical electron motions, meandering in a weak magnetic field and gyration in a strong magnetic field, were observed with particular directionalities. The meandering electrons drifted forward on average similarly to those under a dc electric field. The gyration induced an electron drift towards the inverse direction. The direction of electron flux was dependent not only on the rf phase but also on the distance from the magnetically neutral midplane between the antiparallel magnetic fields. The electron conduction path formed along the midplane had a structure consisting of forward and inverse lanes. A peculiar result was that the direction of local electron flux was always forward in the strong magnetic field whereas the drift of gyrating electrons was towards the inverse direction. This seemingly paradoxical result can appear in the presence of the density gradient of the electron distribution.

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Section: Electron Fluxmentioning

confidence: 99%

Rectification effect of gradient antiparallel magnetic fields on electron conduction in a gas under a radio-frequency electric field

Sugawara¹,

Osaga²,

Yamamoto³

2011

Plasma Sources Sci. Technol.

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“…n e of the NLD plasma increases and its ring shape becomes clearcut under a strong magnetic field. The resulting high electrical conductivity of the NLD plasma enables an efficient power supply, 10) which is desirable for a high throughput in material processing.…”

Section: Experimental Setup and Measured Datamentioning

confidence: 99%

“…The NL radius r NL was about 20.5 cm. The NL was formed near the side wall to obtain tight coupling between the NLD plasma, which can be modelled as a ring conductor, 10) and the rf antenna, as often arranged in practical operations of the NLD plasma. The magnetic field strength was about 2.0 mT at the origin.…”

Section: Experimental Setup and Measured Datamentioning

confidence: 99%

Numerical Simulation of Electron Transport in Electric and Magnetic Fields for Analysis of Electron Temperature and Number Density Profiles Measured in Argon Magnetic Neutral Loop Discharge Plasma

Sugawara

Osaga

Tsuboi

et al. 2010

Jpn. J. Appl. Phys.

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A Monte Carlo simulation of electron transport in electric and magnetic fields was performed to analyze experimental data of the electron temperature T e and electron number density n e measured in a magnetic neutral loop discharge (NLD) plasma driven in Ar at 0.13 Pa. T e and n e in the vicinity of the substrate holder were measured with a triple probe, and their radial profiles had peaks at different radial positions.The simulation reproduced these peak positions well under the chosen boundary condition that the electron reflectivity of the side wall was lower than that of the reactor ceiling and the substrate holder. It was explained that the T e peak was formed by high-energy electrons transported from the neutral loop along a separatrix of the quadrupole magnetic field and that the n e peak consisted of electrons undergoing reciprocating motion between the reactor ceiling and the substrate.

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“…3,4) This electron conduction is regarded as a loop plasma current macroscopically 5) and plays a key role in the sustainment of the NLD plasma as the recipient of the electric power supplied through inductive coupling with an rf * Published source: Journal of the Physical Society of Japan 82(6) 064501 (6 antenna. The chaotic electron meandering [6][7][8] and resulting collisionless heating 9) in the APGMFs have been investigated as fundamental processes.…”

Section: Introductionmentioning

confidence: 99%

Scattering-Based Stochastic Process Attracting Electrons Inward under Antiparallel Gradient Magnetic Fields

Sugawara

2013

J. Phys. Soc. Jpn.

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Electron gyration and scattering in a gas under antiparallel gradient magnetic fields (APGMFs) and rf electric field were simulated using a Monte Carlo method to identify the factors of the electron confinement effect of the APGMFs. The inward shift of the gyrocenter at electron scattering worked as an additional factor to electron meandering, which has been regarded as the primary factor of the electron confinement. This scattering-based inward electron attraction occurs by a simple principle that the gyroradius and residence time of electrons become greater under weaker magnetic fields in the inner region of the APGMFs.

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Observation of Characteristics of Magnetic Neutral Loop Discharge Plasma Appearing at Antenna in RF Circuit

Cited by 9 publications

References 9 publications

Rectification effect of gradient antiparallel magnetic fields on electron conduction in a gas under a radio-frequency electric field

Rectification effect of gradient antiparallel magnetic fields on electron conduction in a gas under a radio-frequency electric field

Numerical Simulation of Electron Transport in Electric and Magnetic Fields for Analysis of Electron Temperature and Number Density Profiles Measured in Argon Magnetic Neutral Loop Discharge Plasma

Scattering-Based Stochastic Process Attracting Electrons Inward under Antiparallel Gradient Magnetic Fields

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