Observation of a Visible Line Emission from RF and ECR Oxygen Plasmas

Abstract

Spatial distributions of 777-nm (3s5S-3p5P) emission from oxygen ECR (2.45 GHz) and RF (13.56 MHz) plasmas are observed near an electrode. For the ECR plasma, a peak in the emission near the resonance zone was observed under a certain pressure (4 × 10-3 Torr) accompanied by a decrease in the emission toward the electrode. For the RF plasma, an increase in the emission toward the electrode was observed.