NV-center diamond cantilevers: Extending the range of available fabrication methods

Kleinlein, Johannes; Borzenko, T.; Münzhuber, Franz; Brehm, John A.; Kießling, T.; Molenkamp, Laurens W.

doi:10.1016/j.mee.2016.02.063

Cited by 19 publications

(13 citation statements)

References 11 publications

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“…The NV-centers may be formed within 5 nm of the diamond surface, conserving at the same time long enough spin relaxation time, 100µs [176]. The proximity of the NV-center to the diamond surface enables sensing magnetic field of individual spins that is in the range of µT [172,175,[177][178][179]].…”

Section: Magnetometry With Nvs In Diamondmentioning

confidence: 99%

Measurements of the magnetic properties of conduction electrons

Pudalov

2021

Phys.-Usp.

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We consider various methods and techniques for measuring electron magnetization and susceptibility, which are used in experimental condensed matter physics. The list of considered methods for macroscopic measurements includes magnetomechanic, electromagnetic, modulation-type, and also thermodynamic methods based on the chemical potential variation measurements. We also consider local methods of magnetic measurements based on the spin Hall effects, NV-centers. Several scanning probe magnetometers-microscopes are considered, such as magnetic resonance force microscope, SQUID-microscope, and Hall microscope. The review focuses on the spin magnetization measurements of electrons in non-magnetic materials and artificial systems, particularly, in lowdimensional electron systems in semiconductors and in nanosystems, which came to the forefront in recent years.

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Section: Magnetometry With Nvs In Diamondmentioning

confidence: 99%

Measurements of the magnetic properties of conduction electrons

Pudalov

2021

Phys.-Usp.

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“…First, operational sensors have been presented in 2012 [61]. The work in [41,98] presents more recent nanofabrication approaches. In a further very recent approach, mounting structures holding an array of pillars are used.…”

Section: Nanostructures For Photonics and Scanning Probe Operationmentioning

confidence: 99%

“…Starting from this material, thin, single-crystal diamond membranes can be formed by thinning down diamond plates obtained by polishing (typically several tens of µm thick). To thin the plates down, reactive-ion etching with different reactive gases in the plasma has been used among them chlorine and oxygen-based recipes [41,61], fully-chlorine-based chemistry [101], oxygen/fluorine-based chemistry [98,102] and fully-fluorine-based chemistry [7]. For all of these approaches except in [98], argon is added to the plasma to introduce physical etching (sputter etching) to the process.…”

Section: Nanostructures For Photonics and Scanning Probe Operationmentioning

confidence: 99%

Nanoscale Sensing Using Point Defects in Single-Crystal Diamond: Recent Progress on Nitrogen Vacancy Center-Based Sensors

et al. 2017

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Individual, luminescent point defects in solids, so-called color centers, are atomic-sized quantum systems enabling sensing and imaging with nanoscale spatial resolution. In this overview, we introduce nanoscale sensing based on individual nitrogen vacancy (NV) centers in diamond. We discuss two central challenges of the field: first, the creation of highly-coherent, shallow NV centers less than 10 nm below the surface of a single-crystal diamond; second, the fabrication of tip-like photonic nanostructures that enable efficient fluorescence collection and can be used for scanning probe imaging based on color centers with nanoscale resolution.

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“…To enable truly nanoscale imaging, controlled scanning of the NV in close proximity to the sample via a scanning probe technique such as atomic force microscopy (AFM) is mandatory. An NV placed shallowly (<20 nm) below the top facet of a diamond nanopillar forms an excellent scanning probe for nanoscale sensing and imaging [13][14][15]. In such a design, the nanopillar serves not only as a tip, enabling a controlled approach of the NV to the sample, but also as a nanophotonic device, guiding the PL of the NV efficiently towards the collection optics.…”

Section: Introductionmentioning

confidence: 99%

Optimized single-crystal diamond scanning probes for high sensitivity magnetometry

2018

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The negatively-charged nitrogen-vacancy center (NV) in diamond forms a versatile system for quantum sensing applications. Combining the advantageous properties of this atomic-sized defect with scanning probe techniques such as atomic force microscopy (AFM) enables nanoscale imaging of e.g. magnetic fields. To form a scanning probe device, we place single NVs shallowly (i.e. < 20 nm) below the top facet of a diamond nanopillar, which is located on a thin diamond platform of typically below 1 μm thickness. This device can be attached to an AFM head, forming an excellent scanning probe tip. Furthermore, it simultaneously influences the collectible photoluminescence (PL) rate of the NV located inside. Especially sensing protocols using continuous optically-detected magnetic resonance benefit from an enhanced collectible PL rate, improving the achievable sensitivity. This work presents a comprehensive set of simulations to quantify the influence of the device geometry on the collectible PL rate for individual NVs. Besides geometric parameters (e.g. pillar length, diameter and platform thickness), we also focus on fabrication uncertainties such as the exact position of the NV or the taper geometry of the pillar introduced by imperfect etching. As a last step, we use these individual results to optimize our current device geometry, yielding a realistic gain in collectible PL rate by a factor of 13 compared to bulk diamond and 1.8 compared to our unoptimized devices.

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NV-center diamond cantilevers: Extending the range of available fabrication methods

Cited by 19 publications

References 11 publications

Measurements of the magnetic properties of conduction electrons

Measurements of the magnetic properties of conduction electrons

Nanoscale Sensing Using Point Defects in Single-Crystal Diamond: Recent Progress on Nitrogen Vacancy Center-Based Sensors

Optimized single-crystal diamond scanning probes for high sensitivity magnetometry

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