Numerical study on dust particle charging and dynamics in continuous and pulsed radio frequency argon discharges

Abstract

Charging and dynamics of a spherical dust grain injected into a continuous and pulsed radio frequency (RF) discharge have been studied using a one‐dimensional fluid model. First, the plasma characteristics of the two types of discharges are computed and compared. In the pulsed discharge, it is found that the central electron density exhibits a periodic variation while the averaged electron density is lower compared to that in the continuous discharge due to the decrease in the total ionization rate. Further, the dust charge is computed using the plasma characteristics. It is found that the dust charge negatively increases as the duty cycle ratio increases. Also, the charge in the pulsed discharge is lower in comparison to the continuous discharge due to the shorter duration of the pulsed RF discharge limiting the amount of energy transferred to electrons. On the other hand, the dust particle remains in the powered sheath region exhibiting a damped oscillation in the two discharges with higher oscillation frequency in the continuous discharge.