Abstract:In this study, we research about comb-drive micro-structure, which is a MEMS device used to measure velocities and accelerations. To ensure the accuracy and visualization of the result, we simulate the dynamics of the comb drive using COMSOL Multiphysics, meanwhile introducing the concept of re-meshing. We aim to find the optimal comb-drive-building material, which can provide the device with the most desirable first eigenfrequency. According to the optimization process, silver is the most suitable constructio… Show more
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