1985
DOI: 10.1088/0022-3727/18/12/012
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Numerical simulation of hydrogen ion species in the steady-state plasma of a low-pressure ion source

Abstract: Ion species ratios in a hydrogen plasma are calculated systematically as a function of plasma parameters, i.e. the electron density, the electron temperature. the pressure of hydrogen gas and the plasma volume. Furthermore, in the present analysis. the recombination factor for hydrogen atoms at thewall surface of a vacuum vessel is treated as another plasma parameter.The most significant point is that ion species ratios depend strongly not only on plasma parameters but also on the recombination factor. The pro… Show more

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Cited by 31 publications
(22 citation statements)
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References 23 publications
(8 reference statements)
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“…This means that for partially ionized plasmas, an increase in the electron temperature would suppress the dissociation of H 2 to H atoms and increase H 2 + ion formation. Therefore, the atomic ion fraction should increase with increasing electron density and decreasing electron temperature, which matches the global model and simulation done in [14] and [15]. The highest atomic ion fraction can be achieved using 13.56 MHz with a deuterium fill gas.…”
Section: Resultssupporting
confidence: 75%
“…This means that for partially ionized plasmas, an increase in the electron temperature would suppress the dissociation of H 2 to H atoms and increase H 2 + ion formation. Therefore, the atomic ion fraction should increase with increasing electron density and decreasing electron temperature, which matches the global model and simulation done in [14] and [15]. The highest atomic ion fraction can be achieved using 13.56 MHz with a deuterium fill gas.…”
Section: Resultssupporting
confidence: 75%
“…Fukumasa's selection of reactions, in Ref. 8 for example, is slightly different from ours since he concentrates on higher Te values (>5 eV) for which the dominating reaction by-products, for given reactants (e + H~ for example), are different. We shall consider the reaction rate a, for reaction 4 to be constant, and equal to 1.5 x 10 -9 cm 3 s-~; this is a good approximation since for ion temperatures between 0.05 and 0.5 eV, as in our case, a4 is limited to the range (1.54-0.2) x 10-9cm3s-k The other aj rates are functions of T~ and are calculated from selected cross-sections (see Table I).…”
Section: Assumptionsmentioning
confidence: 77%
“…The production and losses are separated on the right-and left-hand sides of ( 8.20) with the first term on the left-hand side specifying the wall recombination losses [129,307,317] with coefficient (T w ), i.e. the ( N 1 / t) w -term in (8.3);…”
Section: The Changes In the Concentrations Of The Ions And Hydrogen Amentioning
confidence: 99%