The hydrogen atom yield in pure-H2 RF and microwave-sustained
Using this diagnostic, it is observed that the H-atom concentration decreases when the vessel wall temperature increases, owing to the increased efficiency of atomic hydrogen recombination on the wall. To overcome this effect, the discharge tube wall is coolecl off with dimethyl polysiloxane, a low-loss dielectric liquid. It improves significantly the H-atom concentration at 2450 MHz provided the pressure is typically below a few torr and the power density is not too high.KEY WORDS: Hydrogen atoms; H2 discharges; particle balance model; actinometry; atom recombination; wall cooling; dimethyl polysiloxane; diamond.
INTRODUC~ONThe last decades have seen the emergence of several chemical vapor deposition (CVD) methods for diamond synthesis. °) Diamond thin films are particularly useful in applications such as tribology, microelectronics, and optics. ~2) The most widespread CVD method operates at gas pressures in the range 1-100 torr. The driving force for the nucleation of diamond on a substrate is provided by the supersat~iration of hydrocarbon compounds in the gas phase. Apart from diamond, graphite is also likely to deposit since it is the thermodynamically stable phase of carbon under low pressure and low temperature conditions (its Gibbs free energy is lower than that of diamond).To eliminate graphite when it deposits, large quantities of an adequate etchant must be introduced in the gas phase. Ideally, this etchant should ~D6partement de Physique, Universit6 de Montreal, Montreal, Qu6bec H3C 3)7, Canada.