Numerical simulation of high power RF–RF hybrid plasma torch

Abstract

In this paper the possibility of operation of a high-power RF-RF hybrid plasma torch for materials processing is shown with help of numerical simulation. That kind of plasma torch consists of two coaxial ICP/RF torches connected in series. A mathematical model is presented which includes assumptions, basic equations, a computational domain with main sizes. The results of the calculation i.e. the temperature distributions inside the plasma torch for two modes of operation are shown. In the first mode the power is fed only to the first plasma torch (P 1=40 kW, P 2=0), in the second mode the both parts of the RF-RF hybrid plasma torch (P1 = 40 kW, P2 = 600 kW) operate. The obtained results can serve as a basis for further analysis of the operation of a high-power RF-RF hybrid plasma torch.