Numerical Simulation Applied to PVD Reactors: An Overview

Abstract

The technological evolution in the last century also required an evolution of materials and coatings. Therefore, it was necessary to make mechanical components subject to heavy wear more reliable, improving their mechanical strength and durability. Surfaces can contribute decisively to extending the lifespan of mechanical components. Chemical vapor deposition (CVD) and physical vapor deposition (PVD) technologies have emerged to meet the new requirements that have enabled a remarkable improvement in the morphology, composition and structure of films as well as an improved adhesion to the substrate allowing a greater number of diversified applications. Thin films deposition using PVD coatings has been contributing to tribological improvement, protecting their surfaces from wear and corrosion, as well as enhancing their appearance. This process can be an advantage over other processes due to their excellent properties and environmental friendly behavior, which gives rise to a large number of studies in mathematical modelling and numerical simulation, like finite element method (FEM) and computational fluid dynamics (CFD). This review intends to contribute to a better PVD process knowledge, in the fluids and heat area, using CFD simulation methods focusing on the process energy efficiency improvement regarding the industrial context with the sputtering technique.

Machining GX2CrNiMoN26-7-4 DSS Alloy: Wear Analysis of TiAlN and TiCN/Al2O3/TiN Coated Carbide Tools Behavior in Rough End Milling Operations

“…Plasma coating deposition and synthesis techniques have evolved significantly in recent decades, currently with very high levels of sophistication, both through single-layer coatings, multi-layer coatings, and coatings that evolve from a material or composite on one surface, to another on the opposite surface of the coating, gradually passing from one material to another. These techniques have been deeply studied through different and recent overviews which explain their fundamentals and how they have evolved in recent years [1][2][3]. In order to increase tool lifespan and boost productivity, carbide and nitride tools have been gaining more and more market share, with tungsten carbide being used very frequently.…”

The Influence of Laser Modification on a Composite Substrate and the Resistance of Thin Layers Created Using the PVD Process

“…Sensors 2020, 20, x FOR PEER REVIEW 2 of 16 [13,19,20]. As a result, it is expected that the costs of carrying out the process could be reduced, as well as the impact on the quality and the mechanical and electrical properties of the structures produced in this process [21,22,23].…”

“…Using PVD technologies, it is possible to produce coatings with a homogeneous structure, and layers with graded properties and controlled morphology, as well as coatings with excellent adhesion or with predefined shapes [14][15][16][17][18]. The process of physical deposition of layers has been improved by the results of many works on mathematical modeling and numerical simulations [13,19,20]. As a result, it is expected that the costs of carrying out the process could be reduced, as well as the impact on the quality and the mechanical and electrical properties of the structures produced in this process [21][22][23].…”

A Parametric Three-Dimensional Phase-Field Study of the Physical Vapor Deposition Process of Metal Thin Films Aiming at Quantitative Simulations

“…Moreover, the calculated R q to R a ratios for the thin films at the deposition rates of 0.22 and 1.0 nm s −1 agreed very well with the experimental data of the deposited Mo and Ti thin films. Finally, further discussion about the correlative behaviors between the surface roughness and the density was proposed for reasoning the shadowing effect as well as the formation of voids during the thin film production.Coatings 2019, 9, 607 2 of 15 properties [14][15][16][17]. However, in fact, PVD is a considerably sophisticated process and it is extremely difficult to improve the performance of the coating just through variation of the process parameters.…”

“…Coatings 2019, 9, 607 2 of 15 properties [14][15][16][17]. However, in fact, PVD is a considerably sophisticated process and it is extremely difficult to improve the performance of the coating just through variation of the process parameters.…”