Numerical Investigation of Effect of Operating Parameters on the Phase Transformation During Vibration-Assisted Nano-Impact Machining of Silicon by Loose Abrasives
Abstract:Vibration-assisted nano-impact machining by loose abrasives (VANILA) is a newly developed process based on the atomic force microscope (AFM) platform, where the nanoabrasive (diamond particles) slurry is injected between the workpiece and the vibrating AFM probe. This study aims to use the commercial finite element method (FEM) software package abaqus to simulate the phase transformation experienced by the silicon workpiece and to study the effects of VANILA process parameters, such as impact speed, impact ang… Show more
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