1987
DOI: 10.1117/12.941747
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Numerical Analysis Of Multistep Dielectric Gratings

Abstract: An exact numerical method of analyzing deep dielectric gratings with multistep lamellar profiles is presented. This method is able to predict the diffraction efficiencies of dielectric gratings for both TE and TM polarizations.In this paper we use a modal expansion method in terms of modal functions which are rigorous solutions of the Maxwell's equations and fulfill the boundary conditions on the upright enclosing sides of the rectangular profiles.The coefficients of the modal expansion are determined such tha… Show more

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