Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices

Abstract

This paper reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various micro-sensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and requires comprehensive treatment. The proposed 2-D finite element model encompasses cantilever microstructures operating in a vacuum and impacting on a viscoelastic support. The presented numerical analysis focuses on the first three flexural vibration modes and their influence on dynamic characteristics. Simulation results demonstrate the possibility to use higher modes and their particular points for enhancing MEMS performance and reliability through reduction of vibro-impact process duration.

Multiple Timescales and Modeling of Dynamic Bounce Phenomena in RF MEMS Switches

“…Decuzzi [9] et al used a similar approach, but included an adhesive tip force in their model. Ostasevicius [10] used a 2D FEA model to study MEMS cantilever switch closure and bounce. Guo et al [11] used a 3D nonlinear FEA model, along with a finite difference scheme in time to simulate MEMS switch closing events.…”

Influence of contact point location on dynamical and electrical responses of impact‐type vibration energy harvester based on piezoelectric transduction

“…(PZT-5H layer covering whole, half and 0.17 fraction of the substrate -configurations "1", "2" and "3"; Thick PZT-5H with the same length geometry -configurations "4", "5", and "6"). advantages achieved when the stopper is positioned in the nodal point (x/L = 0.78) of the second vibration mode or the second nodal point (x/L = 0.87) of the third mode are related to the intensification of transverse vibrations of the respective modes [16]. It could be noted that the amplification of the second and third transverse modes (when the stopper is located at their nodal points) does not terminate the first two modes of vibrations.…”

Segmentation of Piezoelectric Layers Based on the Numerical Study of Normal Strain Distributions in Bimorph Cantilevers Vibrating in the Second Transverse Mode

“…The time dependent force /(?) is described as cantilever body load in vertical direction and deñned as force/volume using the thickness: = amsincoj, (4) where a is acceleration and is 1.2 m/s , m is mass of cantilever and (tí,, is the excitation frequency, which matches the second resonant frequency of the cantilever under investigation boundary conditions [6].…”

“…the device should adapt to varying excitation frequency so as to be driven in resonance thereby achieving maximal electrical power output. Paper [6] reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various microsensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and requires comprehensive treatment. The proposed 2D finite element model encompasses cantilever microstructurcs operating in a vacuum and impacting on a viscoelastic support.…”