Nucleation and growth of diamond on Si, Cu, and Au substrates

Niu, Chunming; Tsagaropoulos, George; Baglio, J.; Dwight, K.; Wold, A.

doi:10.1016/0022-4596(91)90056-n

Cited by 41 publications

(12 citation statements)

References 15 publications

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“…The pretreated substrates are then transferred to the reactor chamber for deposition. The deposition conditions of composite film are similar to those of the diamond deposition (substrate temperature of 700-1,000°C, CH 4 /H 2 = 0.5-2 %). The main differences lay in the gas phase composition: a very low concentration of TMS (125-500 ppm) is added into the gas phase for the co-deposition of β-SiC phase along with diamond.…”

Section: Basics Of Synthesizing Composite Filmsmentioning

confidence: 98%

“…Therefore, the volume ratios of β-SiC in the composite films are determined by the different TMS/CH 4 ratios in the gas mixture. [6] While talking about the TMS/CH 4 ratio, it is interesting to notice that, the volume of CH 4 and TMS is at a great disparity in the feed gas even at high TMS flow rate (for TMS flow rate of 20 sccm, the TMS/CH 4 ratio is only 0.08). To achieve further control of the synthesis, a microscopic level understanding on the gas phase reaction is required.…”

Section: Basics Of Synthesizing Composite Filmsmentioning

confidence: 98%

“…Under this guidance, the diamond/β-SiC composite films have been successfully synthesized by microwave plasma chemical vapor deposition (MWCVD) and hot filament chemical vapor deposition (HFCVD) techniques. Similar to the pure diamond thin film deposition, a surface pretreatment process, which is normally done by bias enhanced nucleation [3], abrasion of the substrate surface using diamond powder [4] or ultrasonic seeding [5] etc., is required to enhance the diamond nucleation density on the target substrates prior to the deposition. The pretreated substrates are then transferred to the reactor chamber for deposition.…”

Section: Basics Of Synthesizing Composite Filmsmentioning

confidence: 99%

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Diamond/β-SiC Composite Thin Films: Preparation, Properties and Applications

Jiang

Zhuang

2014

Topics in Applied Physics

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Diamond/β-SiC composite films have been fabricated using chemical vapor deposition techniques. The ultimate goal is to create a superior material with combined advantages of both diamond and β-SiC for a wide range of applications, such as tribological and biological coatings, sensors, windows for harsh environment, and electronic devices etc. In this chapter, the recent processes made in the synthesis, characterization and applications of the diamond/β-SiC composite films are reviewed. IntroductionDriven by the ambition to technologically harness both diamond and β-SiC's numerous outstanding properties, the fabrication of diamond/β-SiC composite films was firstly launched using chemical vapor deposition technique in 1992 [1]. The ultimate goal of this activity is to create a superior material with combined advantages of both diamond and β-SiC for a wide range of applications. During the course of the time, good control over the crystallinity, phase distribution and orientation of both diamond and β-SiC phases have been achieved. The composite films have been applied to enhance the adhesion of diamond film on various technologically important substrates, as well as for the fabrication of DNA biosensors. This chapter will start from the basic knowledge of synthesizing diamond/β-SiC composite films, and then move on to present the main approaches in controlling their orientation, phase distribution and crystallinity. In the end of this chapter, the application of the composite film as coating for cutting tools and biosensors will be introduced.

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Section: Basics Of Synthesizing Composite Filmsmentioning

confidence: 98%

Section: Basics Of Synthesizing Composite Filmsmentioning

confidence: 98%

Section: Basics Of Synthesizing Composite Filmsmentioning

confidence: 99%

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Diamond/β-SiC Composite Thin Films: Preparation, Properties and Applications

Jiang

Zhuang

2014

Topics in Applied Physics

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“…The low CH 4 concentration also may be one of the reasons for the absence of diamond deposition because the nucleation density on the non-carbide substrate, such as Cu, was poor. 18) In order to synthesize the diamond, the following improvements were performed:…”

Section: Resultsmentioning

confidence: 99%

Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD

Tsubota

Amano

Kojo

et al. 2013

J. Ceram. Soc. Japan

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Diamond film and ultrananocrystalline diamond (UNCD) film were synthesized on BeCu alloy substrate by using hot filament CVD apparatus. We succeed in the synthesis of diamond film and Boron-doped electrically conductive diamond film on the substrate. Moreover, UNCD film was successfully synthesized by the CVD apparatus, although this film was not electrically conductive electrically conductive. At the first stage of the CVD process for UNCD, needle-shape deposits appeared. A two-step process, that is, the synthesis of UNCD and then boron-doped diamond, was effective for the synthesis of the electrically conductive diamond film having smooth surface.

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“…In order to enhance the density of diamond nuclei, scratching the substrate with diamond grit is quite effective. The scratching results in diamond residual particles which provide seeds for diamond growth [10]. The hot filament chemical vapor deposition technique possesses many advantages over other methods, being much simpler and easier to adopt for a large-area deposition at a lower cost, which is of special interest for many applications [11].…”

Section: Introductionmentioning

confidence: 99%

Tribological Performance of Titanium Alloy Ti–6Al–4V via CVD–diamond Coatings

Din

Shah

Sheikh

2018

J. Superhard Mater.

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In the present study, HFCVD nanocrystalline, microcrystalline and boron-doped nanocrystalline diamond coatings have been deposited on titanium alloy. The effect of boron doping on coefficient of friction and residual stresses of diamond coatings have been studied. The tribological characteristics of the aforementioned three coatings on Ti-6Al-4V substrates were studied using ball on disc microtribometer, the thickness of the coatings being 3 μm. The coated Ti-6Al-4V discs were slid against alumina (Al 2 O 3 ) balls with normal load ranging from 1 to 10 N. The borondoped NCD coated sample disc was found to possess the lowest average coefficient of friction ~ 0.0804 while the undoped NCD and MCD coated sample discs were found to possess the average coefficients of friction of ~ 0.143 and ~ 0.283, respectively. Raman spectroscopy studies revealed that the residual stresses in boron-doped nanocrystalline coatings were tensile in nature, while the residual stresses in undoped NCD and MCD were found to be of compressive nature.

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Nucleation and growth of diamond on Si, Cu, and Au substrates

Cited by 41 publications

References 15 publications

Diamond/β-SiC Composite Thin Films: Preparation, Properties and Applications

Diamond/β-SiC Composite Thin Films: Preparation, Properties and Applications

Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD

Tribological Performance of Titanium Alloy Ti–6Al–4V via CVD–diamond Coatings

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