1999
DOI: 10.1143/jjap.38.6860
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Nucleation and Growth of Cu Adsorbates on Hydrogen-Terminated Si(111) Surface in Solution

Abstract: We report, for the first time, the behavior of Cu nucleation and growth on hydrogen- (H-) terminated Si(111) surface in solution. The samples were prepared by immersing H-terminated Si(111) surfaces in Cu-containing sulfuric acid solution with various immersion times. The Cu-adsorbed silicon surfaces were observed with an atomic force microscope (AFM). Statistical analysis of the AFM images indicates that Cu nucleation occurred immediately after immersing into the solution, and the coverage of the surfaces wit… Show more

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Cited by 5 publications
(2 citation statements)
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“…23, that copper prefers to adsorb at dihydride rather than monohydride sites on the surface, agrees with our results and supports experiments studying copper nucleation. [40][41][42][43][44] These calculations are part of a larger effort to include the role of metal impurities in a multiscale model of anisotropic wet chemical etching. Although a quantitative comparison with etching experiments still requires full integration of these results into mesoscale simulations, we can compare the general trends.…”
Section: Discussionmentioning
confidence: 99%
“…23, that copper prefers to adsorb at dihydride rather than monohydride sites on the surface, agrees with our results and supports experiments studying copper nucleation. [40][41][42][43][44] These calculations are part of a larger effort to include the role of metal impurities in a multiscale model of anisotropic wet chemical etching. Although a quantitative comparison with etching experiments still requires full integration of these results into mesoscale simulations, we can compare the general trends.…”
Section: Discussionmentioning
confidence: 99%
“…21 The metal formation process is accompanied by a gradual oxidation of the mesoporous layer and, thus, eventually limited by its complete pore wall oxidation. However, consistent experimental information on the chemical and physical processes occurring during spontaneous copper deposition is not available even though some theoretical 22,23 and experimental [24][25][26] efforts have been undertaken to elucidate metal deposition, in particular, copper formation, on PS. For example, Tatsumura et al 23 performed first-principle quantum chemical calculations to clarify the nucleation sites of Cu on H-terminated Si surfaces.…”
mentioning
confidence: 99%