2008
DOI: 10.1109/led.2008.2005070
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Novel Twin Poly-Si Thin-Film Transistors EEPROM With Trigate Nanowire Structure

Abstract: This letter demonstrates a novel twin poly-Si thinfilm transistor (TFT) electrical erasable PROM (EEPROM) that utilizes trigate nanowires (NWs). The NW TFT EEPROM has superior gate control because its trigate structure provides a higher memory window and program/erase (P/E) efficiency over those of a single-channel one. For endurance and retention, the memory window can be maintained at 1.5 V after 10 3 P/E cycles and 25% charge loss for ten years of NW twin poly-Si EEPROM. This investigation explores its feas… Show more

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Cited by 17 publications
(13 citation statements)
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References 12 publications
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“…The voltage windows are degenerated by 200 mV after 10-k cycles. The retention characteristics of cell before and after stress are measured at 85°C [11] and shown in Fig. 13(b).…”
Section: Experiments Resultsmentioning
confidence: 99%
“…The voltage windows are degenerated by 200 mV after 10-k cycles. The retention characteristics of cell before and after stress are measured at 85°C [11] and shown in Fig. 13(b).…”
Section: Experiments Resultsmentioning
confidence: 99%
“…For BBHE operation, the device exhibited almost no data retention capacity. The Ω-gate structure has a higher P/E efficiency than the tri-gate structure because the four corners of the channel are all surrounded by the gate structure [13,14]. The Ω-gate structure contributes to the equal sharing of the electric field and reduces the probability of leakage in the floating-gate devices in the form of stress-induced leakage current, improving the reliability of the device.…”
Section: Resultsmentioning
confidence: 99%
“…In our previous works [13,14], NWs were introduced into twin poly-Si TFT NVM to increase P/E speed. However, reducing the P/E voltage while ensuring the reliability of this device remains a challenge.…”
Section: Introductionmentioning
confidence: 99%
“…5 A simple EEPEROM that uses planar twin poly-Si TFTs has been proposed for SOP and 3-D stacked high-density memory applications, 2 6 7 and it is compatible to current very large scale integration (VLSI) electronic system. In our previous work, 8 a structure of tri-gate NWs was introduced into planar twin poly-Si TFTs EEPEROM to enhance the programming and erasing efficiency. However, * Author to whom correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%