Novel thin film titanium nitride micro-electrodes with excellent charge transfer capability for cell stimulation and sensing applications

Janders, M.; Egert, Ulrich; Stelzle, Martin; Nisch, W.

doi:10.1109/iembs.1996.656936

Cited by 64 publications

(71 citation statements)

References 3 publications

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“…The impedance magnitude values measured for cMEAs are at the same level with the earlier reported values [27][28][29]. As no previous reports about titanium MEAs exist, there is no direct comparison to earlier results corresponding to tMEAs.…”

Section: Impedance Magnitude Analysissupporting

confidence: 83%

“…Wide availability and sufficiently good electrical characteristics have made platinum black (Pt black) probably the most commonly used microelectrode surface coating throughout MEA history [1,4,23,24], even if it suffers from adhesion and reproducibility problems [25,26]. TiN is the microelectrode surface material favored by one of the leading commercial MEA manufacturers (Multi Channel Systems (MCS), Reutlingen, Germany) [27][28][29]. Iridium oxide (IrOx) is widely studied, even though not yet commercialized, microelectrode coating that has excellent charge transfer capacity and high long term stability, but suffers from need for electrochemical (re)activation [25,26,30].…”

Section: Introductionmentioning

confidence: 99%

“…Iridium oxide (IrOx) is widely studied, even though not yet commercialized, microelectrode coating that has excellent charge transfer capacity and high long term stability, but suffers from need for electrochemical (re)activation [25,26,30]. There is no common opinion whether TiN or IrOx has better characteristics [26,28,31]. Recently several groups have reported microelectrodes coated with carbon nanotubes (CNTs) [32][33][34][35] which have not only superior electrical properties but also support cell adhesion via extremely rough surface [34].…”

Section: Introductionmentioning

confidence: 99%

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All Titanium Microelectrode Array for Field Potential Measurements from Neurons and Cardiomyocytes—A Feasibility Study

et al. 2011

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Abstract:In this paper, we describe our all-titanium microelectrode array (tMEA) fabrication process and show that uncoated titanium microelectrodes are fully applicable to measuring field potentials (FPs) from neurons and cardiomyocytes. Many novel research questions require custom designed microelectrode configurations different from the few commercially available ones. As several different configurations may be needed especially in a prototyping phase, considerable time and cost savings in MEA fabrication can be achieved by omitting the additional low impedance microelectrode coating, usually made of titanium nitride (TiN) or platinum black, and have a simplified and easily processable OPEN ACCESSMicromachines 2011, 2 395 MEA structure instead. Noise, impedance, and atomic force microscopy (AFM) characterization were performed to our uncoated titanium microelectrodes and commercial TiN coated microelectrodes and were supplemented by FP measurements from neurons and cardiomyocytes on both platforms. Despite the increased noise levels compared to commercial MEAs our tMEAs produced good FP measurements from neurons and cardiomyocytes. Thus, tMEAs offer a cost effective platform to develop custom designed electrode configurations and more complex monitoring environments.

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Section: Impedance Magnitude Analysissupporting

confidence: 83%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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All Titanium Microelectrode Array for Field Potential Measurements from Neurons and Cardiomyocytes—A Feasibility Study

et al. 2011

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“…Ø 25 µm Au/Ti electrodes on SU-8 above microfluidic PDMS channels on glass (Musick et al, 2009 (Connolly et al, 1990;Breckenridge et al, 1995;Sandison et al, 2002) (Haemmerle et al, 1994;Nisch et al, 1994;Janders et al, 1996;Fejtl et al, 2006) 60 R,S…”

Section: Rsmentioning

confidence: 99%

Prospects for Neuroprosthetics: Flexible Microelectrode Arrays with Polymer Conductors

Blau¹

2011

Applied Biomedical Engineering

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“…Many approaches have been investigated with the aim of achieving sufficient performance, even with miniaturized electrodes. One promising approach is to utilize capacitive electrodes (4)(5)(6) that improve electrode performance by increasing the real surface area obtained by a micro/nano-scale surface morphology. The introduction of reactive electrodes such as oxides (7)(8)(9) and organic polymers (10) has also been investigated.…”

Section: Introductionmentioning

confidence: 99%

Electrochemical Evaluation of Geometrical Effect and Three-dimensionalized Effect of Iridium Oxide Electrodes Used for Retinal Stimulation

Noda

Chen

et al. 2018

Sensors and Materials

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Keywords: retinal prosthesis, neural stimulation, stimulus electrode, three-dimensionalized electrode, iridium oxideThe geometry dependence and three-dimensionalized effect of the electrochemical properties of iridium oxide electrodes used in retinal prosthesis are discussed herein. Planar electrodes with various geometries were fabricated. Three-dimensionalized electrodes with microfabricated resin cores were also fabricated. The charge storage capacity (CSC) and charge injection capacity (CIC), both of which are important properties for neural stimulation, were quantitatively evaluated. This evaluation showed the important electrode property that the surface area dominantly affects the CSC. On the other hand, the CIC was not proportionally related to the electrode area, confirming that the edge region of the electrodes is significant in the mechanism of action. Moreover, performance enhancement with a three-dimensionalized electrode was clearly confirmed. The fundamental properties of highly effective stimulus electrodes were successfully evaluated and a detailed discussion is presented.

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Novel thin film titanium nitride micro-electrodes with excellent charge transfer capability for cell stimulation and sensing applications

Cited by 64 publications

References 3 publications

All Titanium Microelectrode Array for Field Potential Measurements from Neurons and Cardiomyocytes—A Feasibility Study

All Titanium Microelectrode Array for Field Potential Measurements from Neurons and Cardiomyocytes—A Feasibility Study

Prospects for Neuroprosthetics: Flexible Microelectrode Arrays with Polymer Conductors

Electrochemical Evaluation of Geometrical Effect and Three-dimensionalized Effect of Iridium Oxide Electrodes Used for Retinal Stimulation

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