Novel Test Procedure of Tensile Test for MEMS Materials

Park, Jun Hyub; Kim, Yun Jae; Myung, Man Sik; Lee, Chang Seung; Choa, Sung‐Hoon; Choi, Nam Sup

doi:10.4028/0-87849-412-x.136

Cited by 2 publications

(3 citation statements)

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“…Although there are several methods to measure elastic moduli of a thin film, 13-21 the present work utilized direct tensile tests using the microtensile-testing machine developed by the authors. 22,23 The testing machine is equipped with a load-cell (for measuring load) and a capacitance sensor (for measuring displacement between grips). More detailed descriptions for the micro-tensile testing machine can be found in Park et al 22,23 Tensile tests were performed in the atmospheric air condition at room temperature with the constant loading rate of 270mN/min.…”

Section: Tensile Testsmentioning

confidence: 99%

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Determination of tensile properties and residual stresses of Ni-Co thin films

Park

Bae²,

Kim³

2010

Int. J. Precis. Eng. Manuf.

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This paper reports tensile properties and residual stresses of Ni-Co thin films. To measure elastic (and plastic) properties, direct tensile tests using dog-bone type specimens are performed first. Assuming that residual stresses vary linearly through the film thickness, bending and membrane residual stress components are measured using cantilever beam and T-structure beam specimens, respectively. Averaged values of Young's modulus, yield strength and tensile strength are found to be about 163GPa, 1,700MPa and 2,000MPa, respectively. The membrane and bending residual stress components are found to be about 825MPa and 47MPa, respectively.

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Section: Tensile Testsmentioning

confidence: 99%

“…3. 23 The thickness and width of specimens were fixed to t=10µm and b=100µm, respectively. The proposed specimen has several notable features.…”

Section: Tensile Testsmentioning

confidence: 99%

Determination of tensile properties and residual stresses of Ni-Co thin films

Park

Bae²,

Kim³

2010

Int. J. Precis. Eng. Manuf.

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“…The microtensile tester used in these tests was constructed according to a new design especially for closed-loop testing of thin films by authors [13][14][15] . It uses a voice coil of speaker as actuator.…”

Section: Test Machinementioning

confidence: 99%

Effect of Fabrication on High Cycle Fatigue Properties of Copper Thin Films

Park

An²,

Kim³

et al. 2008

Acta Mech. Solida Sin.

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The influence of fabrication on the tensile and fatigue behavior of copper films manufactured by 3 kinds of fabrication methods was investigated. The tensile and high cycle fatigue tests were performed using the test machine developed by authors. Young's moduli (72, 71 and 69 GPa, respectively) are lower than the literature values (108-145 GPa), while the yield strengths were as high as 358, 350 and 346 MPa, respectively and the ultimate strengths as 462, 456 and 446 MPa, respectively. There is not much difference in the tensile properties of the 3 kinds of films. There is little difference in the fatigue properties of the 3 kinds of films but one of them has shorter fatigue life than others in high cycle region and longer fatigue life than others in low cycle region.

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Novel Test Procedure of Tensile Test for MEMS Materials

Cited by 2 publications

References 0 publications

Determination of tensile properties and residual stresses of Ni-Co thin films

Determination of tensile properties and residual stresses of Ni-Co thin films

Effect of Fabrication on High Cycle Fatigue Properties of Copper Thin Films

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