Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS

Batooli, Leili; Maldonado, Sandra Guadalupe; Judelewicz, Moshe; Mischler, S.

doi:10.3390/mi6050611

Cited by 10 publications

(6 citation statements)

References 19 publications

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“…It could be observed from the exhausted literature covered related to improving the materials suited for manufacturing of MEMS, especially SU-8, that there are many factors influencing the tribological and the mechanical behavior of materials. By changing the percentage of a particular filler by small amount, there could be drastic changes in the surface properties, which could evidently be seen from the literature where small change in the concentration of ionic liquid in SU-8 has resulted change in the tribological behavior 16 and a drastic change in surface energy making the surface, SU-8/talc/graphite, hydrophobic from hydrophilic was observed by adding another material, PEPE, to the coating. 22 These were few examples reflecting the importance of adding a new material along with its different composition in altering the surface properties, therefore, in order to completely investigate the tribological/mechanical behavior, there has to be large number of factors considered leaving behind huge amount of data to be collected and investigated.…”

Section: Introductionmentioning

confidence: 96%

“…[9][10][11][12][13][14][15] Further, the use of ionic liquid was also investigated by blending different concentrations of it in SU-8 to derive a direct relationship for the tribological properties with the concentration of the ionic liquid used. 16 Anand Singh et al 17 investigated tribological properties of SU-8 and its composites obtained by adding 10 wt.% of hexagon boron nitride and 20 wt.% of Perflouropolyether(PFPE) as fillers to get reduced co-efficient of friction to 0.08-0.09, with improved thermal stability of 80 − 120 • C. Kalathil A et al 18 studied ultra-high-molecular-weight polyethylene (UHMWPE) as a filler material for SU-8, Structalit 8801, an another bio compatible epoxy, and found better tribological performance for SU-8, making the composite suitable for biomedical applications. Many researchers have also investigated the use of different additives to the composite of SU-8 + UHMWPE to further enhance tribological and mechanical properties along with proper binding in the matrix.…”

Section: Introductionmentioning

confidence: 99%

“…9–15 Further, the use of ionic liquid was also investigated by blending different concentrations of it in SU-8 to derive a direct relationship for the tribological properties with the concentration of the ionic liquid used. 16…”

Section: Introductionmentioning

confidence: 99%

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Prediction of friction coefficient of su-8 and its composite coatings using machine learning techniques

Mohammed

Dodla

Katiyar

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part J:

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Machine learning (ML) techniques are used to predict the coefficient of friction of an epoxy polymer resin (SU-8) and its composite coatings deposited on a silicon wafer. Filler type and the number of cycles are taken as the input parameters. The filler types included, two solid fillers namely, graphite and talc, and a liquid filler such as Perfluoropolyether (PFPE). Six variations of the SU8 coatings were developed based on the different combinations of filers used and tested. The experimental data generated for these different coatings for varying number of cycles (0 to 499) was used to train the different ML algorithms like ANN, SVM, CART, and RF to predict the coefficient of friction. The performance of these ML techniques was compared by calculating mean absolute error (MAE), root means square error (RMSE), and square of the correlation coefficient (R2). The ANN algorithm was observed to have the best (R2) metrics while the other ML techniques SVM, CART, and RF had a satisfactory performance with some inaccuracies seen for the CART algorithm for the data set under consideration.

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Section: Introductionmentioning

confidence: 96%

Section: Introductionmentioning

confidence: 99%

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Prediction of friction coefficient of su-8 and its composite coatings using machine learning techniques

Mohammed

Dodla

Katiyar

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part J:

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“…Moreover, the initial and steady-state coefficients of friction were reduced. Further, Batooli et al [15] added ionic liquid in different weight percentages into SU-8 and fabricated an SU-8 composite. These composites were tested on a surface force apparatus (SFA) using a carbon steel ball with a 6 mm diameter.…”

Section: Introductionmentioning

confidence: 99%

Thermo-mechanical and tribological properties of SU-8/h-BN composite with SN150/perfluoropolyether filler

2019

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In this study, SU-8 and its composites are fabricated by blending 10 wt.% hexagonal boron nitride (h-BN) fillers with/without lubricants, such as 10 wt.% base oil (SN150) and 20 wt.% perfluoropolyether (PFPE). The thickness of SU-8 and its composites coating is fabricated in the range ~100-105 μm. Further, SU-8 and its composites are characterized by a 3D optical profilometer, atomic force microscopy, scanning electron microscopy, a thermal gravimetric analyzer, a goniometer, a hardness tester, and an optical microscope. Under a tribology test performed at different normal loads of 2, 4, and 6 N and at a constant sliding speed of 0.28 m/s, the reduction in the initial and steady-state coefficient of friction is obtained to be ~0.08 and ~0.098, respectively, in comparison to SU-8 (~0.42 and ~0.75), and the wear resistance is enhanced by more than 103 times that of pure SU-8. Moreover, the thermal stability is improved by ~80-120 °C , and the hardness and elastic modulus by ~3 and ~2 times that of pure SU-8, respectively. The SU-8 composite reinforced with 10 wt.% h-BN and 20 wt.% PFPE demonstrated the best thermo-mechanical and tribological properties with a nano-textured surface of high hydrophobicity.

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“…-The formulation of new materials based on SU-8 is the main topic of two papers, both studying the improvement of the tribological properties of this material, by creating a new composite material based on a SU-8 polymer matrix in which either perfluoropolyether lubricant droplets [6] or droplets of an ionic liquid [7] are dispersed. -Innovative processing methods of SU-8 are described in four papers.…”

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confidence: 99%

Special Issue: 15 Years of SU8 as MEMS Material

Bertsch

Renaud

2015

Micromachines

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In 1997, the first paper using SU-8 as a material for microfabrication was published [1], demonstrating the interest of this negative photoresist for the near-UV structuration of thick layers and the manufacturing of high aspect-ratio components. SU-8 quickly became a cheap alternative to X-ray LIGA, at least for applications that did not require the extreme aspect ratios and precision that can be achieved with X-ray lithography. The possibility to pattern easily multilevel structures of expanded significantly its range of applications and led to its early adoption by the industry.In the last 15 years, the interest of the MEMS community for SU-8 has never declined. SU-8 has been used for the manufacturing of a wide range of components in all application areas of microtechnology. After 15 years of use of the SU-8 resist, it is time to look back at the road travelled: This special issue of Micromachines is dedicated to SU-8 as MEMS material, and its developments in terms of processes and applications.This special issue presents a total of twelve papers that cover a large spectrum of processes and applications of the SU-8 material and includes papers related to established techniques used for industrial production as well as articles dedicated to innovative processing techniques and new potential application areas of this resist.Three of the papers are review articles, focused on different aspects of SU-8. One in particular focuses on industrial applications of SU-8 in the UV-LIGA process [3] and not only describes the primary use of SU-8 for the production of molds, electroplated microparts and multilevel components, but also addresses the fabrication of functionalized parts using inserts and the integration of diffractive optical elements. Mimotec SA, the company from which this paper originates, has its entire manufacturing chain centered on the SU-8 material and it is of particular interest for all SU-8 users to have an industrial perspective presented in this special issue. Another paper reviews non-standard techniques that can be used for processing : inclined and backside photolithography, drawing lithography, holographic interference lithography, two-photo absorption lithography and moving mask OPEN ACCESS

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Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS

Cited by 10 publications

References 19 publications

Prediction of friction coefficient of su-8 and its composite coatings using machine learning techniques

Prediction of friction coefficient of su-8 and its composite coatings using machine learning techniques

Thermo-mechanical and tribological properties of SU-8/h-BN composite with SN150/perfluoropolyether filler

Special Issue: 15 Years of SU8 as MEMS Material

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