Novel piezoresistive high-g accelerometer geometry with very high sensitivity-bandwidth product

Kuells, Robert; Nau, Siegfried; Salk, M.; Thoma, Klaus

doi:10.1016/j.sna.2012.05.014

Cited by 50 publications

(29 citation statements)

References 26 publications

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“…Acceleration is one of the most important parameters in the characterization of an object's movement. Usually, the acceleration sensors are based on force sensing mechanisms, including piezoresistive or differential capacitance, which has a wide variety of applications for industrial engineering, biology and navigation [67,68]. An external power source is indispensable to drive these sensors.…”

Section: Teng As Self-powered Acceleration Sensorsmentioning

confidence: 99%

Triboelectric nanogenerators as self-powered active sensors

2015

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The development of internet of things and the related sensor technology have been a key driving force for the rapid development of industry and information technology. The requirement of wireless, sustainable and independent operation is becoming increasingly important for sensor networks that currently could include thousands even to millions of sensor nodes with different functionalities. For these purposes, developing technologies of self-powered sensors that can utilize the ambient environmental energy to drive the operation themselves is highly desirable and mandatory. The realization of self-powered sensors generally has two approaches: the first approach is to develop environmental energy harvesting devices for driving the traditional sensors; the other is to develop a new category of sensors-self-powered active sensors-that can actively generate electrical signal itself as a response to a stimulation/triggering from the ambient environment. The recent invention and intensive development of triboelectric nanogenerators (TENGs) as a new technology for mechanical energy harvesting can be utilized as self-powered active mechanical sensors, because the parameters (magnitude, frequency, number of periods, etc.) of the generated electrical signal are directly determined by input mechanical behaviors. In this review paper, we first briefly introduce the fundamentals of TENGs, including the four basic working modes. Then, the most updated progress of developing TENGs as self-powered active sensors is reviewed. TENGs with different working modes and rationally designed structures have been developed as self-powered active sensors for a variety of mechanical motions, including pressure change, physical touching, vibrations, acoustic waves, linear displacement, rotation, tracking of moving objects, and acceleration detection. Through combining the opencircuit voltage and the short-circuit current, the detection of both static and dynamic processes has been enabled. The integration of individual sensor elements into arrays or matrixes helps to

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Section: Teng As Self-powered Acceleration Sensorsmentioning

confidence: 99%

Triboelectric nanogenerators as self-powered active sensors

2015

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“…As the main geometrical configuration for accelerometers, the beam-mass structure can work smoothly by sensing the inertia force caused by the applied acceleration. Single cantilever-mass structures, which appeared in the first monolithic microaccelerometers, feature good sensitivity but poor cross-axis immunity and dynamical response [21]; the dual cantilever-mass structure partly solves the latter problem by promoting the beam-perpendicular-direction stiffness; subsequently, the double-supported-beam, quad-beam and cross-beam structures greatly enhance the primary and lateral stiffness, but diminish the sensitivity at the same time [22]; then, many improved sensing structures (e.g., multi-beam-mass [23], slotted-beam-mass [24], planner-beam [25], gapped-cantilever-beam [26] etc.) are constructed to obtain better comprehensive characteristics considering the sensitivity, resonant frequency and cross-axis sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Thermal-Performance Instability in Piezoresistive Sensors: Inducement and Improvement

Liu

Wang

Zhao

et al. 2016

Sensors

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The field of piezoresistive sensors has been undergoing a significant revolution in terms of design methodology, material technology and micromachining process. However, the temperature dependence of sensor characteristics remains a hurdle to cross. This review focuses on the issues in thermal-performance instability of piezoresistive sensors. Based on the operation fundamental, inducements to the instability are investigated in detail and correspondingly available ameliorative methods are presented. Pros and cons of each improvement approach are also summarized. Though several schemes have been proposed and put into reality with favorable achievements, the schemes featuring simple implementation and excellent compatibility with existing techniques are still emergently demanded to construct a piezoresistive sensor with excellent comprehensive performance.

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“…However, these methods depend on new processes or new materials, and they are difficult to manufacture in mass production. Therefore, many researchers are still concentrated on the geometry design to optimize accelerometers [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 ].…”

Section: Introductionmentioning

confidence: 99%

A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency

Zhao

Jiang

et al. 2016

Sensors

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For improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers, the dependency between the stress of the piezoresistor and the displacement of the structure is taken into consideration in this paper. In order to weaken the dependency, a novel structure with suspended piezoresistive beams (SPBs) is designed, and a theoretical model is established for calculating the location of SPBs, the stress of SPBs and the resonant frequency of the whole structure. Finite element method (FEM) simulations, comparative simulations and experiments are carried out to verify the good agreement with the theoretical model. It is demonstrated that increasing the sensitivity greatly without sacrificing the resonant frequency is possible in the piezoresistive accelerometer design. Therefore, the proposed structure with SPBs is potentially a novel option for improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers.

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Novel piezoresistive high-g accelerometer geometry with very high sensitivity-bandwidth product

Cited by 50 publications

References 26 publications

Triboelectric nanogenerators as self-powered active sensors

Triboelectric nanogenerators as self-powered active sensors

Thermal-Performance Instability in Piezoresistive Sensors: Inducement and Improvement

A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency

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