2014
DOI: 10.3390/s140406910
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Novel Piezoelectric Effect and Surface Plasmon Resonance-Based Elements for MEMS Applications

Abstract: This paper covers research on novel thin films with periodical microstructure—optical elements, exhibiting a combination of piezoelectric and surface plasmon resonance effects. The research results showed that incorporation of Ag nanoparticles in novel piezoelectric—plasmonic elements shift a dominating peak in the visible light spectrum. This optical window is essential in the design of optical elements for sensing systems. Novel optical elements can be tunable under defined bias and change its main grating p… Show more

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Cited by 10 publications
(4 citation statements)
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References 19 publications
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“…Metal nanoparticles are used in technology applications, such as sensing, , catalysis, , optoelectronics, and microelectromechanical systems . Their reliability in these applications depends on their stability and mechanical behavior and thus requires a clear understanding of their deformation under load.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Metal nanoparticles are used in technology applications, such as sensing, , catalysis, , optoelectronics, and microelectromechanical systems . Their reliability in these applications depends on their stability and mechanical behavior and thus requires a clear understanding of their deformation under load.…”
Section: Introductionmentioning
confidence: 99%
“…Metal nanoparticles are used in technology applications, such as sensing, 1 , 2 catalysis, 3 , 4 optoelectronics, 5 and microelectromechanical systems. 6 Their reliability in these applications depends on their stability and mechanical behavior and thus requires a clear understanding of their deformation under load. It is well established that decreasing the size of a structure increases its strength by reducing or eliminating defects and defect sources, giving rise to the “smaller-is-stronger” trend.…”
Section: Introductionmentioning
confidence: 99%
“…The important advantages of polymer thin films are that they can be prepared easily and at low cost. Poly methyl methacrylate (PMMA) is one of the promising representatives of polymeric materials and there are numerous proposals for its application as dielectric in organic thin film transistors (OTFTs) (Puigdollers et al,2004;Uemura et al, 2003;Chandar Shekar et al, 2004), sensors (Ponelyte and Palevicius, 2014) as optical lenses in cameras and optical fibers (Nakata et al, 2004;Yang et al, 2004) . Extensive work has been carried out on synthesis, preparation and various properties such as morphology, dielectric, optical and aging behavior of PMMA films (Sakai et al, 2009;Konno et al, 2009;Kim et al, 2009;Mabrook et al, 2009) .…”
Section: Introductionmentioning
confidence: 99%
“…The aim of this Special Issue is to develop a basic understanding of the field, its supporting technologies and current applications. The special issue has collected interesting papers covering topics dedicated to a wide range of applications, in particular in the areas of humidity [ 1 , 2 ], chemical [ 3 ], mechanical [ 4 , 5 ], electromagnetic [ 6 ], electrochemical, piezoelectric [ 1 , 3 , 6 ], biosensors [ 3 , 7 ] and wearable sensors and actuators. In addition, the issue has also received papers from different scientific groups regarding methods in fabrication [ 8 ], materials characterization [ 5 , 9 ] for optimization of polymer sensors and actuators performances, as well as supporting electronics [ 2 ].…”
mentioning
confidence: 99%