Novel parallel measurement method of spectral confocal sensor with multi-point scanning
Mingyue Xu,
Shijie Liu,
Sen Han
et al.
Abstract:Spectral confocal technology has widespread applications in the field of surface topography measurement. However, conventional spectral confocal sensors are limited to acquiring height information for one point at a time during the measurement process. Consequently, the need for point-by-point scanning compromises the efficiency of existing methodologies. To address this challenge, we propose a novel measurement method utilizing a Nipkow disk and spectral imaging technology. This innovative approach enables si… Show more
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