Novel Optical Interference Means to Measure Small Linear and Angular Displacements of Control Object Surfaces

Miroshnichenko, I. P.; Parinov, Ivan A.; Wu, Jiing-Kae; Hong, Wang; Yeh, Min-Yen

doi:10.1007/978-3-319-56062-5_49

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Don State Technical University Rostov-on-don Russian Feder1

Introduction Purpose and Statement Of The Problem1

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Cited by 4 publications

(2 citation statements)

References 10 publications

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“…В работах [11][12] представлены новые способ и оптическое устройство для измерения малых пространственных (линейных и всех угловых) перемещений поверхностей объектов контроля.…”

Section: Don State Technical University Rostov-on-don Russian Federunclassified

Data processing of measuring intensity of optical field fringe patterns generated by laser interference measuring means

Miroshnichenko¹

2017

Vestnik of DSTU

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Section: Don State Technical University Rostov-on-don Russian Federunclassified

Data processing of measuring intensity of optical field fringe patterns generated by laser interference measuring means

Miroshnichenko¹

2017

Vestnik of DSTU

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“…Such studies allow us to establish the features of the formation of defects in advanced materials and to perform diagnostics of the state of structural materials and goods. The measuring instruments [1][2][3][4], created on the base of a two-way laser interferometer with combined branches, are the most applicable and preferred for the solution of the pointed problems. The scheme of the laser interferometer is shown in Figure 1, where the beam splitter 1 with known amplitude transmission is located in a plane S, related to a associated Cartesian coordinate system Oxyz.…”

Section: Introduction Purpose and Statement Of The Problemmentioning

confidence: 99%

Determination of the Electromagnetic Field on the Surface of the Beam Splitter of Laser Interferometer by Measuring the Displacements of Control Object Surfaces

et al. 2018

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The paper describes in detail the governing relationships for the electromagnetic field on the surface of the laser beam splitter of a laser interferometer. These expressions are intended for numerical simulation of measuring the displacements of control object surfaces by using a laser interferometer. We consider the cases of perpendicular and parallel polarizations of the radiation source. Moreover, the most relevant particular cases of constructing optical circuits of the interferometer in question are treated. The presented theoretical results have been used in numerical studies of the functional characteristics of promising contactless optical means of measuring displacements. The use of the described results has improved the quality and informativeness of the numerical simulation results of the measurement process of displacements by a laser interferometer.

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Development of a New Optical Measuring Set-Up

Miroshnichenko

Parinov

2018

IOP Conf. Ser.: Mater. Sci. Eng.

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Novel Optical Interference Means to Measure Small Linear and Angular Displacements of Control Object Surfaces

Cited by 4 publications

References 10 publications

Data processing of measuring intensity of optical field fringe patterns generated by laser interference measuring means

Data processing of measuring intensity of optical field fringe patterns generated by laser interference measuring means

Determination of the Electromagnetic Field on the Surface of the Beam Splitter of Laser Interferometer by Measuring the Displacements of Control Object Surfaces

Development of a New Optical Measuring Set-Up

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