2005
DOI: 10.1088/0957-4484/16/10/001
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Novel one-dimensional nanogap created with standard optical lithography and evaporation procedures

Abstract: This article details a simple four-step procedure to create a one-dimensional nanogap on a buried oxide substrate that relies on conventional photolithography performed on a stack of silicon/silicon oxide/silicon, metal evaporation, and hydrofluoric acid oxide removal. Once the nanogap was fabricated it was bridged with an assembly of 1,8-octanedithiol and 5 nm Au nanoparticles capped with a sacrificial dodecylamine coating. Before assembly, characterization of the nanogaps was performed through electrical mea… Show more

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Cited by 29 publications
(29 citation statements)
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References 13 publications
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“…This prominent study demonstrates the possibility of fabricating nanostructures with a single or few molecules connected to two nanoelectrodes by bottom-up chemical assembly. Alternatively, inorganic films [112][113][114][115] with a precise atomic thickness separating two metal leads can also serve as templates, and are referred to as atomic rulers. The inorganic spacing layer should also be selectively removed in some way like the organic molecular rulers, at the same time leaving the metal leads unaffected.…”
Section: Molecular Ruler and Nanostructure Template For Nanogap Electmentioning
confidence: 99%
“…This prominent study demonstrates the possibility of fabricating nanostructures with a single or few molecules connected to two nanoelectrodes by bottom-up chemical assembly. Alternatively, inorganic films [112][113][114][115] with a precise atomic thickness separating two metal leads can also serve as templates, and are referred to as atomic rulers. The inorganic spacing layer should also be selectively removed in some way like the organic molecular rulers, at the same time leaving the metal leads unaffected.…”
Section: Molecular Ruler and Nanostructure Template For Nanogap Electmentioning
confidence: 99%
“…3,102 A TJMD approach also democratizes opportunities for worldwide researchers. A TJMD's tunnel junction have been produced using photolithography and physical vapor deposition systems 23 ; after that molecular self-assembly process commenced to establish molecular conduction channels as the¯nal step to complete molecular device fabrication.…”
Section: Economical Fabrication and Commercialization Possibilitymentioning
confidence: 99%
“…Previous attempts to form nanogaps have been made by moving two tips mounted on macroscopic actuators close together, which prevents high-bandwidth gap control. Various methods of conductive nanogap nanofabrication have been developed: mostly direct electron-beam lithography, 7 mechanical pulling, 8 shadow masking, 9 electromigration, 10 electroplating, 11 focused ion beam (FIB), 12 angled metal evaporation, 13 and silicon micromachining. 3,14,15 Most nanogaps are fabricated by laborious serial processes that would introduce a large variation in gap sizes or on a substrate that would interfere with electrical and optical measurements.…”
Section: Introductionmentioning
confidence: 99%