Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

Zhao, Zinan; Li, Nian; Qu, Yilin; Chen, Weiqiu

doi:10.1007/s10483-023-3056-6

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2024

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Cited by 3 publications

References 28 publications

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Coupled vibrations of thickness-extensional FBARs under stress-strain biasing state

Zhao,

Li,

et al. 2024

International Journal of Mechanical Sciences

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Coupled vibrations of thickness-extensional FBARs under stress-strain biasing state

Zhao,

Li,

et al. 2024

International Journal of Mechanical Sciences

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A new Stroh formalism for gradient electro-mechanics with applications to Lamb waves in piezoelectric and flexoelectric coupled plates

Zhu,

Li,

Pan

et al. 2024

Journal of Applied Physics

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In this paper, a new Stroh formalism for gradient electro-mechanics is derived for the first time, which is both mathematically concise and numerically powerful, applicable to generally coupled anisotropic material systems. Based on this new formalism, the complicated Lamb wave in flexoelectric and piezoelectric plates is investigated. The dispersion equation is obtained by solving the eigenvalue problem along with the unconditionally stable dual-variable and position method. From the obtained dispersion equation, the dispersion curves and mode shapes of the Lamb wave are calculated by the 1D form of the multidimensional moduli ratio convergence method. Two important and interesting features are observed from our analysis: One is the difference in the mode shape symmetry between the piezoelectric and flexoelectric cases, and the other is the size-dependent property of the flexoelectric effect as observed by nondimensionalization. These features are further illustrated by comparing the dispersion curves and wave-mode shapes among the three different material models (purely piezoelectric, purely flexoelectric, and flexoelectric and piezoelectric coupled). The newly derived Stroh formalism offers a robust, concise, and unified approach for dealing with strain gradient electro-mechanic materials with crystal systems of general anisotropy. The present work also explains the physical mechanism of symmetry breaking observed, as induced by flexoelectric coupling in piezoelectric materials.

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High-Frequency Vibrations of Piezoelectric Film Bulk Acoustic Resonators Under Complex Initial Stress-Strain Biasing States

Zhao,

Li,

et al. 2024

Preprint

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Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

Cited by 3 publications

References 28 publications

Coupled vibrations of thickness-extensional FBARs under stress-strain biasing state

Coupled vibrations of thickness-extensional FBARs under stress-strain biasing state

A new Stroh formalism for gradient electro-mechanics with applications to Lamb waves in piezoelectric and flexoelectric coupled plates

High-Frequency Vibrations of Piezoelectric Film Bulk Acoustic Resonators Under Complex Initial Stress-Strain Biasing States

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