Novel mems power generator with integrated thermoelectric and vibrational devices

Satô, Norio; Ishii, Hiroyuki; Urano, Masami; Sakata, Tomomi; Tanida, Jun; Morimura, Hiroki; Shigematsu, Satoshi; Kudou, Kazuhisa; Kamei, Takayuki; Machida, Katsuyuki

doi:10.1109/sensor.2005.1496415

Cited by 9 publications

(7 citation statements)

References 15 publications

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“…We applied the technique to a gold electrode in vibrational MEMS devices consisting of a gold vibrator and electrodes both having comb-shaped structures with a high tooth density. 4) The electrodeposition procedure is shown in Fig. 1.…”

Section: Problems With Electrodeposition After Release Ashingmentioning

confidence: 99%

“…In this paper, we describe the application of electrodeposition to a gold electrode in a vibrational MEMS device consisting of a gold vibrator and electrodes, both of which have comb-shaped structures with a high tooth density. 4) We determine the causes of problems in applying the technique to this complicated gold structure and describe a method of solving them. The organic dielectric film electrodeposited by this method prevents electrical shorts and in-use sticking between the gold vibrator and the electrodes, ensuring high durability.…”

Section: Introductionmentioning

confidence: 99%

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Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices

Sakata

Ishii

Satô

et al. 2006

jjap

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In this paper, we describe the application of electrodeposition to microelectromechanical system (MEMS) devices made of gold. After the release ashing of an organic sacrificial layer by oxygen plasma exposure, the thickness of the organic dielectric film electrodeposited on gold surfaces was found to be nonuniform. A surface analysis by X-ray photoelectron spectroscopy revealed that the causes of the nonuniformity were the differences in chemical states and amounts of gold oxide that arose from oxygen plasma exposure at different places. A uniform coating was obtained by removing the gold oxide by hydrochloric acid dipping before electrodeposition on gold comb-shaped electrodes in a vibrational MEMS device. This uniform coating prevents electrical shorts and in-use sticking between the gold vibrator and electrode in the device, ensuring high durability.

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Section: Problems With Electrodeposition After Release Ashingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices

Sakata

Ishii

Satô

et al. 2006

jjap

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“…Such harvesters are increasingly used as an autonomous power source in the nodes of wireless sensor networks. The newest trends in using thermoelectric generators are wearable energy sources for ultra-low-power sensors, harvesters using small temperature gradients as energy sources, and on-chip thermoelectric harvesters [6][7][8][9][10][11][12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

Spatial Equivalent Circuit Model for Simulation of On-Chip Thermoelectric Harvesters

2020

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Interest in autonomous low-power energy sources has risen with the development and widespread use of devices with very low energy consumption. Interest in thermoelectric harvesters has increased against this background. Thermoelectric harvesters, especially harvesters on-chip, have peculiar properties related to the thermal route, thermal transients, and spatial temperature distribution within the chip. A behavioral model of the harvester is required for engineers to successfully develop voltage converters with maximum power point tracking and energy storage units. There are accurate models based on the finite element method, but these models are usually not compatible with simulators of electrical circuits, and therefore are not convenient for designers. Existing equivalent circuit models fit this requirement, but usually do not consider many parameters. This article proposes an original method that allows simulating spatial thermoelectric processes by analogy with the finite difference method, using electrical circuits simulations software. The study proposes a complete methodology for building the model and examples of simulations of one-, two- and three-dimensional problems, as well as examples of simulation of macro problems in the presence of external thermal and electrical devices, such as heatsink and electrical load.

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“…Several approaches have been proposed in past few years, such as heat [1,2], vibration [3 ~ 6], light [7,8], pressure [9,10], movement [11,12], and etc. One possibility to overcome the power limitations is to extract energy from the environment either to recharge a batter or to directly power the electronic devices.…”

Section: Introductionmentioning

confidence: 99%

A Novel Device to Harvest Kinetic Energy from Human Body Motion

Xie

2009

HKIE Transactions

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Mobile electronic devices such as cellular phones, remote controllers, PDAs, and etc, are everywhere. Most of these devices, if not all, are powered by batteries. While the battery is effective, its capacity and life is limited causing various concerns. Therefore, sustainable power source for mobile electronics is important. This paper presents a new energy harvester to harvest the human kinetic energy and converts it to electricity for mobile electronic devices. The proposed design consists of a stator and an eccentric mass made of permanent magnet as the rotor. It can generate magnetic field and hence, the electricity from the human body motion. In order to accommodate the motions in both horizontal and vertical planes, in the proposed design, a torsion spring is added onto the rotor providing an initial position such that the accelerations in both directions can be effectively harvested. Moreover, the harvester can be made as a bangle or integrated into a mechanical watch. With 40 mm in diameter and 20 g in weight, the proposed device could generate about 30 mW.

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Novel mems power generator with integrated thermoelectric and vibrational devices

Cited by 9 publications

References 15 publications

Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices

Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices

Spatial Equivalent Circuit Model for Simulation of On-Chip Thermoelectric Harvesters

A Novel Device to Harvest Kinetic Energy from Human Body Motion

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